Functional membrane for ion beam transmission, beam line device using functional membrane for ion beam transmission, filter device using functional membrane for ion beam transmission, and method of adjusting filter device
AssigneesJapan Atomic Energy Agency, Pesco, Inc.
InventorsNatsuko Fujita, Akihiro Matsubara
Life of this patent
Estimating the term…
Abstract
To provide a functional membrane for ion beam transmission capable of enhancing ion beam transmittance and improving beam emittance. A functional membrane for ion beam transmission according to the present invention is used in a beam line device through which an ion beam traveling in one direction passes and has a channel. The axis of the channel is substantially parallel to the travel direction of the ion beam.
Claims19
1-18. (canceled)
A functional membrane for ion beam transmission used in a beam line device through which an ion beam traveling in one direction passes, having a channel, and having such a thickness that charge state distribution of incident ion can maintain an equilibrium state, characterized in that
- a channel axis is substantially parallel to a travel direction of the ion beam.
A beam line device characterized by comprising:
- a vacuum chamber in which an ion beam passes;
- a functional membrane for ion beam transmission having a channel, having such a thickness that charge state distribution of incident ion can maintain an equilibrium state, and disposed in the vacuum chamber;
- and
- a positioning stage attached with the functional membrane for ion beam transmission and configured to adjust the position of the functional membrane for ion beam transmission, wherein
- adjustment is made by the positioning stage such that the functional membrane for ion beam transmission is disposed in the beam line of the ion beam and that a channel axis of the functional membrane for ion beam transmission is substantially parallel to a traveling direction of the ion beam.
A filter device that removes an unwanted particle contained in an ion beam traveling in a vacuum chamber, characterized by comprising:
- a vacuum chamber in which an ion beam passes;
- a functional membrane for ion beam transmission having a channel, having such a thickness that charge state distribution of incident ion can maintain an equilibrium state, and disposed in the vacuum chamber;
- and
- a positioning stage attached with the functional membrane for ion beam transmission and configured to adjust the position of the functional membrane for ion beam transmission, wherein
- adjustment is made by the positioning stage such that the functional membrane for ion beam transmission is disposed in the beam line of the ion beam and that a channel axis of the functional membrane for ion beam transmission is substantially parallel to a traveling direction of the ion beam.
A method for adjusting a filter device including:
- a vacuum chamber in which an ion beam passes;
- a functional membrane for ion beam transmission having a channel and disposed in the vacuum chamber;
- a positioning stage attached with the functional membrane for ion beam transmission and configured to adjust the position of the functional membrane for ion beam transmission;
- a Faraday cup disposed downstream of the positioning stage and configured to capture the ion beam;
- and
- a current measuring part that measures current based on the ion beam captured by the Faraday cup,
- the method being characterized by comprising:
- a step of adjusting the position of the positioning stage such that the functional membrane for ion beam transmission is disposed in a beam line and that current measured by the current measuring part becomes maximum.
A method for adjusting a filter device including:
- a vacuum chamber in which an ion beam passes;
- a functional membrane for ion beam transmission having a channel and disposed in the vacuum chamber;
- a positioning stage attached with the functional membrane for ion beam transmission and configured to adjust the position of the functional membrane for ion beam transmission;
- a Faraday cup disposed downstream of the positioning stage and configured to capture the ion beam;
- and
- a current measuring part that measures current based on the ion beam captured by the Faraday cup,
- the method being characterized by comprising:
- a first step of adjusting the position of the positioning stage such that the ion beam passes through a position at which the functional membrane for ion beam transmission is absent and that current measured by the current measuring part becomes maximum;
- and
- a second step of adjusting, after the first step, the position of the positioning stage such that the functional membrane for ion beam transmission is disposed in a beam line and that current measured by the current measuring part becomes maximum.
Dependencies are inferred from the claim text.