Acoustic wave element
AssigneeKYOCERA Corporation
InventorsTetsuya KISHINO, Motoki ITO
Life of this patent
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AssigneeKYOCERA Corporation
InventorsTetsuya KISHINO, Motoki ITO
Estimating the term…
An acoustic wave element includes an IDT electrode including electrode fingers, a first substrate on an upper surface of which the IDT electrode is located, which has a thickness of less than 2 times a repetition interval of the electrode fingers and is configured by a piezoelectric crystal, a second substrate bonded to a lower surface of the first substrate, and configured by an Si single crystal having a plane orientation of a (100) plane or (110) plane or a plane equal to them, in which substrate a crystal axis of the Si single crystal parallel to a substrate surface of Si single crystal is inclined at any angle of 25° to 65°, 115° to 155°, 205° to 245°, and 295° to 345° relative to a direction of propagation of an acoustic wave when viewed from the upper surface of the superposed first substrate.
An acoustic wave element comprising:
An acoustic wave element comprising:
An acoustic wave element comprising:
Dependencies are inferred from the claim text.