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US 2020/0028484 A1Published application
Electrode Defined Resonator
AssigneeII-Vi Delaware, Inc.
InventorsDi Lan, Wen-Qing Xu, Giovanni Barbarossa
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Abstract
A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. A surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to the carrier.
Claims15
A bulk acoustic resonator comprising:
- a resonator body including:
- a piezoelectric layer;
- a device layer;
- and
- a top conductive layer on the piezoelectric layer opposite the device layer, wherein substantially all of a surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to a carrier that is separate from the resonator body.
2 more elements
Dependencies are inferred from the claim text.