Driving system having reduced vibration transmission
AssigneeAsm Technology Singapore Pte Ltd
InventorsKeng Yew SONG, Ka Shing KWAN, Yue ZHANG, Xiao Liang CHEN, Chu Fan FENG
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Abstract
A driving system has a driving motor body operative to produce a driving force for driving an object to move in reciprocating directions. A pivotal support is located between the driving motor body and a machine base for supporting the driving motor body on the machine base. The pivotal support causes at least a portion of the driving motor body to rotate relative to the machine base in an opposite direction to a direction of the driving force produced by the driving motor body to drive the object, so as to reduce vibration transmission to the machine base.
Claims16
A driving system for reducing vibration transmission from a driving motor to a machine base, the driving system comprising:
- a driving motor body operative to produce a driving force for driving an object to move in reciprocating directions;
- a pivotal support for supporting the driving motor body, the pivotal support being located between the driving motor body and the machine base;
- wherein the pivotal support is operative to cause at least a portion of the driving motor body to rotate relative to the machine base in an opposite direction to a direction of the driving force produced by the driving motor body to drive the object.
Dependencies are inferred from the claim text.