Refrigeration structure of semiconductor laser, and semiconductor laser and stack thereof

Abstract

The invention provides a cooler of the semiconductor laser, a semiconductor laser comprising the cooler, and a stack of the semiconductor lasers, all of which can be applied to high power devices, and have high environmental adaptability and reliability. The cooler of a semiconductor laser includes: a heat sink including a liquid cooling circuit and an upper surface, a first insulation layer disposed on the upper surface of the heat sink, and a first electrical and thermal conductive layer disposed on the first insulation layer; a laser chip and a negative conductive layer are disposed on different positions of the first electrical and thermal conductive layer; a positive surface of the laser chip is directly bonded on the first electrical and thermal conductive layer; an insulating interlayer is disposed between the negative conductive layer and a surface of the first electrical and thermal conductive layer; and the negative conductive layer is connected to a negative surface of the laser chip; or, the first electrical and thermal conductive layer includes a positive area and a negative area which are insulated from each other; the laser chip includes a positive surface and a negative surface, the positive surface is bonded to the positive area, and the negative surface is connected to the negative area.

Dependencies are inferred from the claim text.