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US 2020/0028208 A1Published application
System And Method For Atomic Layer Deposition Of Solid Electrolytes
AssigneeThe Regents of the University of Michigan
InventorsNeil P. Dasgupta, Eric Francis Kazyak
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Abstract
A method of making an ionically conductive layer for an electrochemical device is disclosed. The method includes the steps of: (a) exposing a substrate to a lithium-containing precursor followed by an oxygen-containing precursor; and (b) exposing the substrate to a boron-containing precursor followed by the oxygen-containing precursor.
Claims22
A method of making an ionically conductive layer, the method comprising:
- (a) exposing a substrate to a lithium-containing precursor followed by an oxygen-containing precursor;
- and
- (b) exposing the substrate to a boron-containing precursor followed by the oxygen-containing precursor.
A method of making an electrochemical device, the method comprising:
- (a) exposing a substrate to a lithium-containing precursor followed by an oxygen-containing precursor;
- and
- (b) exposing the substrate to a boron-containing precursor followed by the oxygen-containing precursor,
- wherein an ionically conductive layer is formed on the substrate, and
- wherein the substrate is selected from the group consisting of a current collector, an anode, a cathode, and a solid state electrolyte.
2 more elements
The method of claim 14 wherein:
- the substrate is a solid state electrolyte.
Dependencies are inferred from the claim text.