Metal landing on top electrode of rram
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yang Chang, Wen-Ting Chu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yang Chang, Wen-Ting Chu
Estimating the term…
Some embodiments relate to an integrated circuit including one or more memory cells arranged over a semiconductor substrate between an upper metal interconnect layer and a lower metal interconnect layer. A memory cell includes a bottom electrode disposed over the lower metal interconnect layer, a data storage or dielectric layer disposed over the bottom electrode, and a top electrode disposed over the data storage or dielectric layer. An upper surface of the top electrode is in direct contact with the upper metal interconnect layer without a via or contact coupling the upper surface of the top electrode to the upper metal interconnect layer. Sidewall spacers are arranged along sidewalls of the top electrode, and have bottom surfaces that rest on an upper surface of the data storage or dielectric layer.
An integrated circuit (IC) including one or more memory cells arranged over a semiconductor substrate between an upper metal interconnect layer and a lower metal interconnect layer, a memory cell comprising:
An integrated circuit (IC), comprising:
An integrated circuit (IC) comprising:
Dependencies are inferred from the claim text.