Back to results
US 2020/0028066 A1Published application
Piezoelectric laminate, method of manufacturing the piezoelectric laminate and piezoelectric device
AssigneesSciocs Company Limited, Sumitomo Chemical Company, Limited
InventorsKenji SHIBATA, Kazutoshi WATANABE, Fumimasa HORIKIRI
Life of this patent
Estimating the term…
Abstract
There is provided a piezoelectric laminate, including: a substrate; and a piezoelectric film formed on the substrate, wherein the piezoelectric film is a film containing an alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0<x<1), and having Young's modulus of less than 100 GPa.
Claims10
A piezoelectric laminate, comprising:
- a substrate;
- and
- a piezoelectric film formed on the substrate,
- wherein the piezoelectric film is a film containing an alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0<x<1), and having Young's modulus of less than 100 GPa.
1 more element
A method of manufacturing a piezoelectric laminate, comprising:
- forming a piezoelectric film on a substrate, the film containing an alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0<x<1) and the film having Young's modulus of less than 100 GPa.
A piezoelectric device, comprising:
- a piezoelectric laminate comprising a substrate, a first electrode film formed on the substrate, a piezoelectric film formed on the first electrode film containing an alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0<x<1), and having Young's modulus of less than 100 GPa, and a second electrode film formed on the piezoelectric film;
- and
- at least either a voltage application unit or a voltage detection unit connected between the first electrode film and the second electrode film.
Dependencies are inferred from the claim text.