Synthetic quartz glass cavity member, synthetic quartz glass cavity lid, optical device package, and making methods
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHarunobu Matsui, Daijitsu Harada, Daiyu OKAFUJI, Hiroyuki YAMAZAKI, Masaki TAKEUCHI
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Abstract
A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surface (3a). The top surface (2a) is a mirror surface and the side surface (3a) is a rough surface.
Claims15
A synthetic quartz glass cavity member adapted to be bonded to a substrate having an optical device mounted thereon such that the device may be accommodated in the cavity member,
- the cavity member having an inside surface consisting of a surface portion opposed to an active surface of the device and a remainder surface portion, the opposed surface portion being a mirror surface and the remainder surface portion being a rough surface.
A method for manufacturing a synthetic quartz glass cavity member, comprising the steps of:
- drilling a first synthetic quartz glass substrate at a plurality of positions to form a to plurality of through-holes,
- laying a second synthetic quartz glass substrate on the first synthetic quartz glass substrate to form a laminate, the second synthetic quartz glass substrate having a mirror surface which is opposed to the perforated synthetic quartz glass substrate, and
- cutting the laminate at a position between adjacent through-holes into a plurality of discrete synthetic quartz glass cavity members.
Dependencies are inferred from the claim text.