Method for manufacturing photovoltaic cells with a rear side polysilicon passivating contact
AssigneeNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
InventorsLambert Johan Geerligs, Martien Koppes, Yu Wu, Maciej Stodolny, Martijn Lenes
Life of this patent
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Abstract
A method for manufacturing a photovoltaic cell from a substrate (2) having a front side (4), a back side (6) and an edge (8). A carrier selective contact structure (4a) of a first type is provided on at least a part of the front side (4). A stack (10) having a thin oxide layer covered by a polysilicon layer is applied, wherein the stack (10) is applied to the back side (6) and the front side (4) of the substrate (2), and possibly also on edge (8). The stack (10) of thin oxide layer and polysilicon layer on the front side (4) is then removed.
Claims18
Method for manufacturing a photovoltaic cell from a substrate having a front side, a back side and an edge, the method comprising:
- providing a carrier selective contact structure of a first type on at least a part of the front side;
- applying a stack having a thin oxide layer covered by a polysilicon layer, wherein the stack is applied to the back side and the front side of the substrate;
- removing the stack of thin oxide layer and polysilicon layer on the front side.
Dependencies are inferred from the claim text.