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US 2020/0028008 A1Published application
Metal-contact-free photodetector
AssigneeElenion Technologies, LLC
InventorsThomas Wetteland Baehr-Jones, Yi Zhang, Michael J. Hochberg, Ari Novack
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Abstract
A Ge-on-Si photodetector constructed without doping or contacting Germanium by metal is described. Despite the simplified fabrication process, the device has responsivity of 1.24 A/W, corresponding to 99.2% quantum efficiency. Dark current is 40 nA at −4 V reverse bias. 3-dB bandwidth is 30 GHz.
Claims21
1-24. (canceled)
A photodetector, comprising:
- a substrate;
- a semiconductor layer on the substrate, including a waveguide extending therein;
- a first n-doped semiconductor contact in the semiconductor layer adjacent to the waveguide;
- a second p-doped semiconductor contact in the semiconductor layer adjacent to the waveguide;
- a first metal terminal, in electrical communication with said first contact and in electrical communication with external circuitry;
- a second metal terminal, in electrical communication with said second contact and in electrical communication with external circuitry;
- a light absorber, consisting of an intrinsic germanium body, mounted on the semiconductor layer in contact with the first and second contacts and lacking direct mechanical contact with the first and second metal terminals.
4 more elements
A method of fabricating a photodetector, comprising:
- patterning a waveguide and contacts in a semiconductor layer;
- etching the semiconductor layer to create a waveguide, and first and second contacts on either side of the waveguide;
- doping the first and second contacts;
- annealing the first and second contacts;
- depositing a light absorber, consisting of an intrinsic germanium body, on the semiconductor layer in contact with the first and second contacts;
- and
- applying metallization to form first and second metal terminals in electrical communication with the first and second contacts, respectively, but lacking direct contact with the light absorber.
4 more elements
Dependencies are inferred from the claim text.