Photoelectric converter, photoelectric conversion module, and electronic instrument
AssigneeSeiko Epson Corporation
InventorDaisuke NAGANO
Life of this patent
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Abstract
A photoelectric converter including a crystalline silicon substrate having a light receiving surface including a smooth section and a rough surface section having surface roughness greater than the surface roughness of the smooth section and a light transmissive inorganic film so provided as to overlap with the smooth section and the rough surface section, and the film thickness t1 of a portion of the inorganic film that is the portion where the inorganic film overlaps with the rough surface section is smaller than the film thickness t2 of a portion of the inorganic film that is the portion where the inorganic film overlaps with the smooth section. The arithmetic average roughness of the rough surface section is preferably greater than or equal to 0.1 μm.
Claims9
A photoelectric converter comprising:
- a crystalline silicon substrate having a light receiving surface including a smooth section and a rough surface section having surface roughness greater than surface roughness of the smooth section;
- and
- a light transmissive inorganic film so provided as to overlap with the smooth section and the rough surface section,
- wherein a film thickness t1 of a portion of the inorganic film that is a portion where the inorganic film overlaps with the rough surface section is smaller than a film thickness t2 of a portion of the inorganic film that is a portion where the inorganic film overlaps with the smooth section.
Dependencies are inferred from the claim text.