Semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsHyukwoo Kwon, Ha-Young YI, Byoungdeog CHOI, Seongmin CHOO
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Abstract
A semiconductor device includes a substrate, a bottom electrode on the substrate, a first support layer on the substrate next to a sidewall of the bottom electrode, a dielectric layer covering the sidewall and a top surface of the bottom electrode, and a top electrode on the dielectric layer. The bottom electrode includes a first part having a plurality of protrusions that protrude from a sidewall of the first part. The first part of the bottom electrode may be on the first support layer.
Claims22
A semiconductor device, comprising:
- a substrate;
- a bottom electrode on the substrate,
- the bottom electrode including a first part including a plurality of protrusions that protrude from a sidewall of the first part;
- a first support layer on the substrate next to a sidewall of the bottom electrode, the first part of the bottom electrode being on first support layer;
- a dielectric layer covering the sidewall of the bottom electrode and a top surface of the bottom electrode;
- and
- a top electrode on the dielectric layer.
A semiconductor device, comprising:
- a substrate;
- a bottom electrode on the substrate,
- the bottom electrode including a plurality of protrusions that protrude from a sidewall of the bottom electrode,
- the plurality of protrusions having convexly curved surfaces;
- a dielectric layer covering a surface of the bottom electrode;
- and
- a top electrode on the dielectric layer.
-19. (canceled)
A semiconductor device, comprising:
- a substrate;
- a plurality of bottom electrodes on the substrate,
- each of the plurality of bottom electrodes including a sidewall, a plurality of protrusions that protrude from the sidewall, and a plurality of first parts that are between the plurality of protrusions and vertically spaced apart from each other,
- the plurality of bottom electrodes including a first bottom electrode and a second bottom electrode, and
- distances between the plurality of first parts of the first bottom electrode and distances between the plurality of first parts of the second bottom electrode being uniform;
- a dielectric layer covering surfaces of the first bottom electrode and the second bottom electrode;
- and
- a top electrode on the dielectric layer.
(canceled)
Dependencies are inferred from the claim text.