Back to results
US 2020/0027927 A1Published application
Manufacturing method of display device and thin-film deposition apparatus using the same
AssigneeSamsung Display Co., Ltd.
InventorsHeon Sik HA, Kwang Hyun KIM, Sang Wook LEE
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a display device, including: providing a display element layer on a substrate; forming a thin film encapsulation layer covering the display element layer; aging the thin film encapsulation layer by using a light source emitting artificial sunlight; and forming a window on the aged thin film encapsulation layer.
Claims5
A thin film deposition apparatus comprising:
- a plurality of chambers,
- wherein one of the plurality of chambers is an entry and exit chamber through which a substrate enters from outside of the thin film deposition apparatus, and at least one of the plurality of chambers is a process chamber, which is configured to deposit a thin film on the substrate;
- and
- a light source coupled to a chamber of the plurality of chambers, and configured to irradiate artificial sunlight on a deposited thin film to age the deposited thin film.
1 more element
Dependencies are inferred from the claim text.