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US 2020/0027915 A1Published application
Optical sensor device
AssigneeUnited Microelectronics Corp.
InventorCheng-Yu HSIEH
Life of this patent
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Abstract
An optical sensor device is provided. The optical sensor device includes a semiconductor substrate, a trench isolation element, and a photodiode. The semiconductor substrate has a back semiconductor surface and a front semiconductor surface opposing to the back semiconductor surface. The back semiconductor surface has a textured surface. The trench isolation element is extended from the back semiconductor surface to the front semiconductor surface. The photodiode is in the semiconductor substrate.
Claims18
An optical sensor device, comprising:
- a semiconductor substrate having a back semiconductor surface and a front semiconductor surface opposing to the back semiconductor surface, wherein the back semiconductor surface has a lens shape surface, wherein the lens shape surface has a textured surface;
- a trench isolation element extending from the back semiconductor surface to the front semiconductor surface;
- and
- a photodiode in the semiconductor substrate.
1 more element
(canceled)
Dependencies are inferred from the claim text.