Semiconductor device and method of manufacturing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Han LIN, Chih-Ren HSIEH, Chin Wen CHAN
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Han LIN, Chih-Ren HSIEH, Chin Wen CHAN
Estimating the term…
In a method of manufacturing a semiconductor device, the semiconductor device includes a non-volatile memory formed in a memory cell area and a ring structure area surrounding the memory cell area. In the method, a protrusion of a substrate is formed in the ring structure area. The protrusion protrudes from an isolation insulating layer. A high-k dielectric film is formed, thereby covering the protrusion and the isolation insulating layer. A poly silicon film is formed over the high-k dielectric film. The poly silicon film and the high-k dielectric film are patterned. Insulating layers are formed over the patterned poly silicon film and high-k dielectric film, thereby sealing the patterned high-k dielectric film.
A semiconductor device including:
A semiconductor device including:
A semiconductor device including:
Dependencies are inferred from the claim text.