Micro led display and manufacturing method thereof

A micro LED display, comprising:

• a substrate having a plurality of electrode structures formed on a first surface thereof, wherein a plurality of circuit structures are formed in the substrate and electrically connected to the plurality of electrode structures;
• an LED functional layer, formed on the substrate and comprising a plurality of LED functional structures which are mutually isolated from one another, wherein the plurality of LED functional structures is correspondingly and electrically connected to the plurality of electrode structures;
• an electrode layer, covering the LED functional layer and electrically connected to the plurality of LED functional structures;
• and
• a plurality of micro lenses, formed on the electrode layer and corresponding to the plurality of LED functional structures, wherein a rewiring layer is formed on a second surface of the substrate;
• and the micro LED display further comprises metal pillars, the metal pillars running through the LED functional layer and the substrate, and being electrically connected to the rewiring layer and the electrode layer.

A micro LED display comprising:

• a substrate having a plurality of electrode structures formed on a first surface thereof, wherein a plurality of circuit structures are formed in the substrate and electrically connected to the plurality of electrode structures;
• an LED functional layer, formed on the substrate and comprising a plurality of LED functional structures which are mutually isolated from one another, wherein the plurality of LED functional structures is correspondingly and electrically connected to the plurality of electrode structures;
• an electrode layer, covering the LED functional layer and electrically connected to the plurality of LED functional structures, and
• a plurality of micro lenses, formed on the electrode layer and corresponding to the plurality of LED functional structures, wherein a periphery of the micro LED display is a tilted plane;
• a rewiring layer is formed on a second surface of the substrate, and extends across the periphery of the micro LED display and is electrically connected to the electrode layer.

A method of manufacturing a micro LED display, comprising:

• providing a substrate, wherein the substrate is provided with a plurality of chip areas, a plurality of electrode structures are formed on a first surface of the substrate, a plurality of circuit structures are formed in the substrate, and the plurality of circuit structures are electrically connected to the plurality of electrode structures;
• forming an LED functional material layer on the substrate, wherein the LED functional material layer covers the plurality of chip areas;
• etching the LED functional material layer to form a plurality of LED functional structures and first openings, each of the first openings running through the LED functional material layer and formed between two adjacent ones of the plurality of LED functional structures;
• forming isolation structures in the first openings, wherein each of the isolation structures fills a corresponding one of the first openings;
• covering the plurality of LED functional structures with an electrode layer, wherein the electrode layer also covers the isolation structures;
• forming a plurality of micro lenses on the electrode layer, wherein the plurality of micro lenses are corresponding to the plurality of LED functional structures;
• and
• slicing the plurality of chip areas to form multiple independent chip structures.