Connection structure for stacked substrates
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Jen Tseng, Wei-Yu Chen, Ting-Wei Chiang, Li-Chun Tien
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Jen Tseng, Wei-Yu Chen, Ting-Wei Chiang, Li-Chun Tien
Estimating the term…
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a semiconductor substrate having a first pair of sidewalls extending in a first direction and a second pair of sidewalls. One or more of the second pair of sidewalls extend past the first pair of sidewalls in a second direction that intersects the first direction as viewed from a top-view of the semiconductor substrate. The first pair of sidewalls and the second pair of sidewalls define one or more trenches within the semiconductor substrate. An interconnecting structure including a conductive material is disposed within the one or more trenches in the semiconductor substrate. The interconnecting structure continuously extends completely through the semiconductor substrate.
An integrated chip, comprising:
An integrated chip, comprising:
An integrated chip, comprising:
Dependencies are inferred from the claim text.