Radio frequency transistor amplifiers and other multi-cell transistors having gaps and/or isolation structures between groups of unit cell transistors

A multi-cell transistor, comprising:

• a semiconductor structure;
• and
• a plurality of unit cell transistors that are electrically connected in parallel, each unit cell transistor extending in a first direction in the semiconductor structure,
• wherein the unit cell transistors are spaced apart from each other along a second direction and arranged in a plurality of groups, wherein a first distance in the second direction between two adjacent unit cell transistors in a first of the groups is less than a second distance in the second direction between a first unit cell transistor that is at one end of the first of the groups and a second unit cell transistor that is in a second of the groups, where the second unit cell transistor is adjacent the first unit cell transistor,
• wherein each unit cell transistor further includes a gate finger that extends in the first direction on the semiconductor structure and a channel region in the semiconductor structure that extends under the gate finger, a source region in the semiconductor structure and a drain region in the semiconductor structure that extend in parallel on opposed sides of the channel region, and wherein a drain finger extends in the first direction on the semiconductor structure over the drain region, and
• wherein the multi-cell transistor further comprises:
• a plurality of gate runners, each gate runner being electrically connected to a respective one of the gate fingers through at least one first conductive via;
• and
• a plurality of gate interconnects that arc electrically connected to respective ones of the gate runners, wherein at least one of the gate runners is connected to one of the gate interconnects by a second conductive via that connects to an interior position of the at least one gate runner that is remote from a first end and a second end of the at least one gate runner.

A multi-cell transistor, comprising:

• a semiconductor structure;
• and
• a plurality of unit cell transistors that are electrically connected in parallel, each unit cell transistor including a gate finger that extends in a first direction on, a top surface of the semiconductor structure, the gate fingers spaced apart from each other along a second direction and arranged on the top surface of the semiconductor structure in a plurality of groups,
• wherein a respective metal isolation structure is provided on the top surface of the semiconductor structure between each pair of adjacent groups, each metal isolation structure having a respective length in the second direction that exceeds a length in the second direction of a first of the unit cell transistors,
• wherein each metal isolation structure comprises a metal pad electrically connected to a source region of the unit cell transistors.

A multi-cell transistor, comprising:

• a semiconductor structure;
• and
• a plurality of unit cell transistors that are electrically connected in parallel, each unit cell transistor including a gate finger that extends in a first direction on a top surface of the semiconductor structure, the gate fingers spaced apart from each other along a second direction and arranged on the top surface of the semiconductor structure in a plurality of groups,
• wherein a respective metal isolation structure is provided on the top surface of the semiconductor structure between each pair of adjacent groups, each metal isolation structure having a respective length in the second direction that exceeds a length in the second direction of a first of the unit cell transistors,
• wherein each metal isolation structure includes a respective metal pad, and
• wherein each metal isolation structure further includes a plurality of vias that physically and electrically connect each respective metal pad to one or more source regions in the semiconductor structure.

A multi-cell transistor, comprising:

• a semiconductor structure;
• a plurality of unit cell transistors that are electrically connected in parallel and that are spaced apart along a second direction, the plurality of unit cell transistors arranged in a plurality of groups, each unit cell transistor including:
• a channel region that extends in a first direction in the semiconductor structure;
• a source region that extends in the first direction in the semiconductor structure on a first side of the channel region;
• a drain region that extends in the first direction in the semiconductor structure on a second side of the channel region that is opposite the first side;
• a gate finger that extends in the first direction above the channel region;
• and
• a drain finger that extends in the first direction above the drain region,
• wherein a metal pad is provided on a top surface of the semiconductor structure between a first of the groups and a second of the groups, the metal pad extending in the first and second directions and electrically connected to the source regions of the unit cell transistors,
• wherein the metal pad is positioned farther from the semiconductor structure than are the gate fingers.