Support Table, Support Table Assembly, Processing Arrangement, and Methods Thereof
AssigneeInfineon Technologies AG
InventorsBernhard Goller, Walter Leitgeb, Daniel Brunner, Lukas Ferlan, Markus Ottowitz
Life of this patent
Estimating the term…
Abstract
According to various embodiments, a support table may include: a baseplate including a support structure, the support structure defining a support region over the baseplate to support at least one of a workpiece or a workpiece carrier therein; and one or more light-emitting components disposed between the baseplate and the support region. The one or more light-emitting components are configured to emit light into the support region.
Claims27
A support table assembly for processing a workpiece, the support table assembly comprising:
- a workpiece carrier comprising a tape frame and a tape attached to the tape frame, the tape comprising a base layer and a light-sensitive adhesive layer configured to adhere a workpiece to the workpiece carrier;
- and
- a support table configured to support the workpiece carrier and comprising one or more light-emitting components configured to emit light into a direction of the tape when the workpiece carrier is supported by the support table,
- wherein the base layer of the tape is transparent for the light emitted by the one or more light-emitting components, for illumination of at least the light-sensitive adhesive layer of the tape.
A support table, comprising:
- a baseplate;
- a support structure defining a support region over the baseplate to support at least one of a workpiece or a workpiece carrier therein;
- and
- one or more light-emitting components disposed between the baseplate and the support region, the one or more light-emitting components configured to emit light into the support region.
A method for processing a workpiece, the method comprising:
- mounting the workpiece to a first tape with a first side of the workpiece facing the first tape, the first tape comprising a base layer and a light-sensitive adhesive layer configured to adhere the workpiece to the base layer;
- after mounting the workpiece to the first tape, illuminating the light-sensitive adhesive layer of the first tape through the base layer;
- after illuminating the light-sensitive adhesive layer of the first tape, processing the workpiece;
- and
- after processing the workpiece, remounting the workpiece to a second tape with a second side of the workpiece facing the second tape, the second surface being opposite to the first surface.
Dependencies are inferred from the claim text.