Ceramic hybrid insulator plate
AssigneeApplied Materials, Inc.
InventorsJonathan SIMMONS, Dana LOVELL
Life of this patent
Estimating the term…
Abstract
The present disclosure generally relates to an electrostatic chuck for processing substrates. The electrostatic chuck includes a facilities plate and an insulator disposed between a cooling base and a ground plate. A support body is coupled to the cooling base for supporting a substrate thereon. A ring is configured to surround the insulator. The ring is formed from a material that is resistant to degradation from exposure to a manufacturing process. The ring optionally includes an extension configured to surround the facilities plate.
Claims20
A process chamber comprising:
- a body having a sidewall and a bottom;
- a lid coupled to the body defining a process volume therein;
- and
- an electrostatic chuck disposed in the process volume, the electrostatic chuck comprising:
- a ground plate;
- an insulator disposed on the ground plate;
- a facilities plate disposed on the insulator;
- a cooling base disposed on the facilities plate;
- a support body disposed on the cooling base, the support body having an electrode therein;
- and
- a ring disposed surrounding the insulator, wherein the ring is formed from a ceramic material.
An electrostatic chuck comprising:
- a ground plate;
- an insulator disposed on the ground plate;
- a facilities plate disposed on the insulator;
- a cooling base disposed on the facilities plate;
- a support body disposed on the cooling base, the support body having an electrode therein;
- and
- a ring disposed surrounding the insulator, wherein the ring is formed from a ceramic material.
An electrostatic chuck comprising:
- a ground plate;
- an insulator disposed on the ground plate;
- a facilities plate disposed on the insulator;
- a cooling base disposed on the facilities plate;
- a support body disposed on the cooling base, the support body having an electrode therein;
- and
- a ring comprising:
- an annular portion surrounding the insulator;
- and
- an extension extending from the annular portion, wherein the extension surrounds the facilities plate.
Dependencies are inferred from the claim text.