Carrier, vacuum system and method of operating a vacuum system
AssigneeApplied Materials, Inc.
InventorsSebastian Gunther ZANG, Andreas SAUER
Life of this patent
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Abstract
A carrier for use in a vacuum system is described. The carrier includes: a magnet arrangement including one or more first permanent magnets; one or more second permanent magnets; and a magnet device configured to change a magnetization of the one or more first permanent magnets. The carrier may be used for carrying a mask device or a substrate in the vacuum system. Further, a vacuum system and a method of operating a vacuum system are described.
Claims20
A carrier for use in a vacuum system, comprising:
- a magnet arrangement, including:
- one or more first permanent magnets;
- and
- one or more second permanent magnets;
- and
- a magnet device configured to change a magnetization of the one or more first permanent magnets.
A mask device for masked deposition on a substrate, comprising an electropermanent magnet arrangement.
A vacuum system, comprising:
- a carrier transportation system configured for transporting a carrier along a carrier transportation path in the vacuum system;
- and
- a handover assembly configured to attach or detach a mask device or a substrate to or from a carrier with a magnet arrangement.
A method of operating a vacuum system, comprising:
- transporting a carrier along a carrier transportation path in the vacuum system, while a mask device or a substrate is held at the carrier by a magnetic force generated by a magnet arrangement.
Dependencies are inferred from the claim text.