Diagnostic system of substrate transfer hand
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsHirohiko GOTO, Tetsuya YOSHIDA, Haruhiko TAN, Kazuo FUJIMORI, Katsuhiro YAMASHITA, Masahiko SUMITOMO
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Abstract
A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.
Claims7
A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, the diagnostic system comprising:
- a camera which is secured to the base part and takes an image of the substrate holding part;
- and
- a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.
Dependencies are inferred from the claim text.