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AssigneeASML Netherlands B.V.
InventorsJeroen Gerard GOSEN, Te-Yu CHEN, Dennis Herman, Caspar VAN BANNING, Edwin Cornelis KADIJK, Martijn Petrus, Christianus VAN HEUMEN, Erheng WANG, Johannes Andreas, Henricus, Maria JACOBS
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An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.
A load lock system, comprising:
A non-transitory computer readable medium including a set of instructions that is executable by one or more processors of a controller to cause the controller to perform a method conducting a thermal conditioning of a wafer, the method comprising:
Dependencies are inferred from the claim text.