Apparatus and method for treating substrate

A method for treating a substrate, the method comprising:

• a substrate treating step of treating the substrate by dispensing a treating liquid onto the substrate while rotating the substrate supported on a support plate in a processing space of a processing vessel;
• and
• a vessel cleaning step of cleaning the processing vessel by dispensing a cleaning solution onto a jig while rotating the jig supported on the support plate,
• wherein an edge region of the jig is upwardly inclined toward the outside while the processing vessel is cleaned in the vessel cleaning step.

An apparatus for treating a substrate, the apparatus comprising:

• a processing vessel having a processing space inside;
• a substrate support unit configured to support and rotate the substrate or a jig in the processing space;
• a liquid dispensing unit including a treating liquid dispensing member configured to dispense a treating liquid for treating the substrate and a cleaning solution dispensing member configured to dispense a cleaning solution for cleaning the processing vessel;
• and
• a controller configured to control the substrate support unit and the liquid dispensing unit,
• wherein the substrate support unit includes:
• a support plate having a vacuum line formed therein to clamp the substrate by vacuum pressure;
• and
• a pressure-reducing member configured to produce the vacuum pressure in the vacuum line, and
• wherein the controller controls the substrate support unit and the liquid dispensing unit to perform a first clamping step of clamping the substrate to the support plate by producing a first vacuum pressure in the vacuum line when treating the substrate by dispensing the treating liquid onto the substrate supported on the substrate support unit and clamping the jig to the support plate by producing a second vacuum pressure different from the first vacuum pressure, in the vacuum line when cleaning the processing vessel by dispensing the cleaning solution onto the jig supported on the substrate support unit.