US 2020/0027722 A1 · LASER ANNEALING DEVICE, LASER ANNEALING METHOD, AND MASK

Abstract

Provided are a laser annealing device, laser annealing method, and mask which make it possible to reduce display blurriness at a mask-joining boundary. The laser annealing device is equipped with a mask in which a plurality of opening blocks, which include a plurality of openings arranged in the column direction parallel to the scanning direction, are arranged in the row direction which is perpendicular to the scanning direction. The laser annealing device moves the mask and/or substrate in a direction parallel to the scanning direction, and each time the mask and/or substrate move to a prescribed position in the direction perpendicular to the scanning direction, performs processing for irradiating a plurality of prescribed substrate regions with a laser beam through the plurality of openings. Furthermore, at least one pair comprising adjacent two opening blocks is provided in a manner such that the position of the openings in a first opening block which is one block among the pair and the position of the openings in a second opening block which is the other block among the pair are offset in the direction parallel to the scanning direction.

Claims12

Dependent claims

A laser annealing device, comprising

a mask including opening blocks arranged side by side in a row direction perpendicular to a scanning direction, each of the opening blocks including openings aligned in a column direction parallel to the scanning direction, the laser annealing device performing a process of moving at least one of the mask and a substrate in a direction parallel to the scanning direction, and emitting a laser beam to predetermined areas on the substrate through the openings whenever at least one of the mask and the substrate is moved to a predetermined position in a direction perpendicular to the scanning direction, wherein
the opening blocks include at least one set of adjacent two opening blocks, and a position of an opening of a first opening block that is one opening block of the set, and a position of an opening of a second opening block that is another opening block of the set are shifted relative to each other in the direction parallel to the scanning direction, a position of the first opening block and a position of the second opening block being shifted relative to each other in the direction parallel to the scanning direction so as not to exceed respective lengths of the first and second opening blocks.

Dependencies are inferred from the claim text.

Laser annealing device, laser annealing method, and mask

Life of this patent

Laser annealing device, laser annealing method, and mask

Life of this patent

Abstract

Claims12