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US 2020/0027702 A1Published application
Gas distributor and flow verifier
AssigneeLam Research Corporation
InventorsMark Taskar, Iqbal A. Shareef
Life of this patent
Estimating the term…
Abstract
Apparatus and methods for distributing and mixing gas are provided. In one example, a gas distributor comprises a body, a gas inlet for admitting gas to the body, an orbital array of gas outlets for distributing the gas to an external component, and a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets.
Claims20
A gas distributor comprising:
- a body;
- a gas inlet for admitting gas to the body;
- an orbital array of gas outlets for distributing the gas to an external component;
- and
- a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets.
2 more elements
A method of distributing gas comprising:
- providing a gas distributor, the gas distributor comprising:
- a body;
- a gas inlet for admitting gas to the body;
- an orbital array of gas outlets for distributing the gas to an external component;
- and
- a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets;
- supplying gas to the central gas distribution point through the gas inlet;
- splitting the supplied gas within the central gas distribution point based on the number of gas outlets in the orbital array, or a percentage of the gas outlets in operation;
- distributing the split gas to each of the gas outlets, or to each of the gas outlets in operation;
- and
- providing the distributed gas to a downstream location.
8 more elements
(canceled)
Dependencies are inferred from the claim text.