Rf generator for generating a modulated frequency or an inter-modulated frequency
AssigneeLam Research Corporation
InventorsSunil Kapoor, Thomas Frederick
Life of this patent
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AssigneeLam Research Corporation
InventorsSunil Kapoor, Thomas Frederick
Estimating the term…
A high frequency radio frequency (RF) generator that generates a high frequency RF signal is described. There is no need for another low frequency RF generator that generates a low frequency RF signal. A low frequency RF signal is pre-amplified within the high frequency RF generator to output a pre-amplified low frequency RF signal. Similarly, a high frequency RF signal is pre-amplified within the high frequency RF generator to output a pre-amplified high frequency RF signal. The high frequency RF generator combines the pre-amplified low frequency RF with the pre-amplified high frequency RF signal to provide a combined RF signal. The combined RF signal is amplified within the high frequency RF generator to supply an amplified signal to a match. There is also no need for another match for the low frequency RF generator.
A radio frequency (RF) generator comprising:
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A radio frequency (RF) generator comprising:
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A method comprising:
A method comprising:
The method of claim 30, further comprising applying a gain to the combined RF signal to output a gain-adjusted RF signal.
Dependencies are inferred from the claim text.