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AssigneeLam Research Corporation
InventorsHyungjoon Kim, Sunil Kapoor, Karl Leeser, Vince Burkhart
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An isolation system includes an input junction coupled to one or more RF power supplies via a match network for receiving radio frequency (RF) power. The isolation system further includes a plurality of channel paths connected to the input junction for distributing the RF power among the channel paths. The isolation system includes an output junction connected between each of the channel paths and to an electrode of a plasma chamber for receiving portions of the distributed RF power to output combined power and providing the combined RF power to the electrode. Each of the channel paths includes bottom and top capacitors for blocking a signal of the different type than that of the RF power. The isolation system avoids a risk of electrical arcing created by a voltage difference between an RF terminal and a non-RF terminal when the terminals are placed proximate to each other.
A system for simultaneously transferring both radio frequency (RF) power and non-RF power, comprising;
The system of claim 9, wherein the slip ring includes a liquid metal contact or a brush contact between the top middle portion and the bottom middle portion.
A system for simultaneously transferring both radio frequency (RF) power and non-RF power, comprising;
A system for simultaneously transferring both radio frequency (RF) power and non-RF power, comprising;
Dependencies are inferred from the claim text.