Apparatus and techniques for beam mapping in ion beam system

A method of controlling an ion beam, comprising:

• scanning the ion beam over a plurality of scan cycles along a fast scan direction;
• mechanically scanning a detector through the ion beam in a slow scan during the plurality of scan cycles of the ion beam, from a first position to a second position along a scan path parallel to the fast scan direction, wherein the detector generates a plurality of spot beam profiles, wherein a spot beam profile corresponds to a beam profile of the ion beam at a given location of the detector along the scan path;
• and
• displaying on a user interface at least one set of information, derived from the plurality of spot beam profiles.

An apparatus for control of an ion beam, comprising:

• a beam scanner to perform a fast scan of the ion beam, along a fast scan direction, over a plurality of scan cycles;
• a detector, disposed to intercept the ion beam, and to perform a slow scan simultaneous to the fast scan, the slow scan comprising moving the detector from a first position to a second position along a scan path parallel to the fast scan direction, wherein a plurality of spot beam profiles are received by the detector during the slow scan;
• and
• a controller, coupled to the beam scanner and the detector, the controller comprising:
• a processor;
• and
• a memory unit coupled to the processor, including a display routine, the display routine operative on the processor to:
• receive position information of the detector during the slow scan, the position information comprising a plurality of detector locations, collected at a plurality of instances;
• receive a set of spot beam profiles, corresponding to the plurality of detector locations;
• determine a spot beam center position at the plurality of detector locations;
• determine a difference between the spot beam center position and an ideal center position at the plurality of detector locations;
• and
• send a signal to display on a user interface the difference as a function of detector location.