Method for operating a plurality of fib-sem systems
AssigneeCarl Zeiss Microscopy GmbH
InventorsJosef Biberger, Ralph Pulwey
Life of this patent
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Abstract
Processes may be performed with a plurality of FIB-SEM systems. A first process group includes recording an image with the electron beam column, depositing material with supply of a process gas, and performing ion beam etching. A second process group includes performing a sample exchange, exchanging a reservoir of a gas source for the process gas, and verifying an image that was recorded with the electron beam column. The processes of the second group are prioritized. The FIB-SEM systems are actuated to work through processes contained in process lists. If in a plurality of FIB-SEM systems processes of the second group are to be performed simultaneously, an instruction based on the prioritization is output to the user.
Claims8
A method for operating a plurality of FIB-SEM systems, wherein each of the FIB-SEM systems comprises an electron beam column for directing an electron beam onto a work region and an ion beam column for directing an ion beam onto the work region;
- wherein each of the FIB-SEM systems is configured such that they can be used to perform at least a plurality of predefined processes, wherein the plurality of predefined processes comprises at least one first group of processes that the FIB-SEM system can perform automatically without the assistance of the user and comprises a second group of processes that the FIB-SEM system must perform with the assistance of the user,
- wherein the first group of processes comprises at least
- recording an image with the electron beam column,
- depositing material with supply of a process gas, and
- performing ion beam etching,
- and the second group of processes comprises at least
- performing a sample exchange,
- exchanging a reservoir of a gas source for the process gas, and
- verifying an image that was recorded with the electron beam column,
- wherein the method comprises:
- prioritizing the processes of the second group;
- maintaining a process list for each of the FIB-SEM systems, wherein each process list contains a plurality of the predefined processes;
- simultaneously actuating each of the FIB-SEM systems to work through the processes contained in each process list with the respective FIB-SEM system;
- if in a first and a second FIB-SEM system of the plurality of FIB-SEM systems a process of the second group of processes is to be performed simultaneously, selecting the process of the second group that is to be performed currently by the first FIB-SEM system when it has a greater priority than the process of the second group that is to be performed currently by the second FIB-SEM system, and selecting the process of the second group that is to be performed currently by the second FIB-SEM system when it has a greater priority than the process of the second group that is to be performed currently by the first FIB-SEM system;
- and
- outputting an instruction to the user to assist the respective FIB-SEM system in the performance of the selected process.
Dependencies are inferred from the claim text.