Transmission electron microscope specimen and method of manufacturing the same

A method of manufacturing a transmission electron microscope specimen, comprising:

• forming a first etching stop layer on a first surface of a substrate;
• forming a first patterned electron-transport membrane on the first etching stop layer, wherein the first patterned electron-transport membrane has a first opening and a second opening exposing the first etching stop layer;
• forming a spacer layer on the first patterned electron-transport membrane and covering the first opening and the second opening;
• forming a second electron-transport membrane on the spacer layer;
• etching the substrate and the first etching stop layer to form a viewing window, a first injection hole, and a second injection hole, wherein the first injection hole and the second injection hole are respectively aligned with and communicate with the first opening and the second opening, and the viewing window is between the first injection hole and the second injection hole;
• and
• etching the spacer layer to form an accommodating space between the first patterned electron-transport membrane and the second electron-transport membrane, wherein the accommodating space communicates with the first injection hole and the second injection hole.