Imaging apparatus, imaging system, and imaging method
AssigneesNational Institute of Advanced Industrial Science and Technology, Nikon Corporation
InventorsYuzuru IKEHARA, Sanae IKEHARA, Masahiro TOTSU, Takuya YANAGAWA, Zhen LIU
Life of this patent
Estimating the term…
Abstract
In order to discriminate sites in a sample effectively, an imaging apparatus according to an embodiment is provided with: a light detector for detecting light radiated from a sample irradiated with first-wavelength infrared light and second-wavelength infrared light from a light source; and a controller for adjusting the intensity of the first-wavelength infrared light or the intensity of the second-wavelength infrared light, and generating an image of the sample based on a detection result obtained by irradiating the sample with the first-wavelength infrared light and the second-wavelength infrared light simultaneously.
Claims37
An imaging apparatus comprising:
- a light detector configured to detect light radiated from a sample irradiated with first-wavelength infrared light and second-wavelength infrared light from a light source;
- and
- a controller configured to adjust at least one of an intensity of the first-wavelength infrared light or an intensity of the second-wavelength infrared light, and configured to generate an image of the sample based on a detection result obtained by irradiating the sample with the first-wavelength infrared light and the second-wavelength infrared light simultaneously.
An imaging apparatus comprising:
- a light detector configured to detect light radiated from a sample due to, while irradiating the sample with first-wavelength infrared light, irradiation of the sample with second-wavelength infrared light with an intensity thereof adjusted with respect to the first-wavelength infrared light;
- and
- a controller configured to generate an image of the sample based on a detection result obtained by the light detector.
An imaging method comprising:
- detecting, by a light detector, light radiated from a sample which is irradiated with first-wavelength infrared light and second-wavelength infrared light from a light source;
- adjusting, by a control apparatus, an intensity of the first-wavelength infrared light or an intensity of the second-wavelength infrared light;
- and
- generating an image of the sample based on a detection result obtained by irradiating the sample with the first-wavelength infrared light and the second-wavelength infrared light simultaneously.
Dependencies are inferred from the claim text.