Flow rate control apparatus, flow rate control method, and program recording medium having recorded therein program for flow rate control apparatus
AssigneeHORIBA STEC, Co., Ltd.
InventorKentaro Nagai
Life of this patent
Estimating the term…
Abstract
In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.
Claims12
A flow rate control apparatus comprising:
- a fluid resistor disposed in a flow channel;
- an upstream valve disposed upstream of the fluid resistor;
- a downstream valve disposed downstream of the fluid resistor;
- a resistor flow rate calculation section to calculate a resistor flow rate being a flow rate of a fluid flowing through the fluid resistor;
- and
- a controller to control the upstream valve or the downstream valve on a basis of a deviation between a set flow rate and the resistor flow rate, or a flow rate deviation being a deviation between the set flow rate and a flow rate calculated from the resistor flow rate, wherein
- the controller is configured to control the downstream valve on a basis of the flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening, and
- the controller is configured to control the upstream valve on a basis of the flow rate deviation when a valve opening of the downstream valve is the predetermined valve opening or more.
A flow rate control method using a flow rate control apparatus comprising a fluid resistor disposed in a flow channel, an upstream valve disposed upstream of the fluid resistor, and a downstream valve disposed downstream of the fluid resistor, the flow rate control method comprising:
- a resistor flow rate calculation step of calculating a resistor flow rate being a flow rate of a fluid passing through the fluid resistor;
- and
- a control step of controlling the upstream valve or the downstream valve on a basis of a deviation between a set flow rate and the resistor flow rate, or a flow rate deviation being a deviation between the set flow rate and a flow rate calculated from the resistor flow rate, wherein
- the control step comprises controlling the downstream valve on a basis of the flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening, and
- the control step comprises controlling the upstream valve on a basis of the flow rate deviation when a valve opening of the downstream valve is the predetermined valve opening or more.
A program recording medium having recorded therein a flow rate control program used for a flow rate control apparatus comprising a fluid resistor disposed in a flow channel, an upstream valve disposed upstream of the fluid resistor, and a downstream valve disposed downstream of the fluid resistor, the flow rate control program causing a computer to implement functions as:
- a resistor flow rate calculation section to calculate a resistor flow rate being a flow rate of a fluid passing through the fluid resistor;
- and
- a controller to control the upstream valve or the downstream valve on a basis of a deviation between a set flow rate and the resistor flow rate, or a flow rate deviation being a deviation between the set flow rate and a flow rate calculated from the resistor flow rate, wherein
- the controller is designed to control the downstream valve on a basis of the flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening, and
- the controller is designed to control the upstream valve on a basis of the flow rate deviation when a valve opening of the downstream valve is the predetermined valve opening or more.
Dependencies are inferred from the claim text.