Method of manufacturing pattern and article manufacturing method

A method of manufacturing a pattern on a substrate, comprising:

• first forming of forming a first pattern in each of a plurality of first regions of the substrate by using a scanning exposure apparatus;
• and
• second forming of forming a second pattern in each of a plurality of second regions of the substrate having undergone the first forming,
• wherein each of the plurality of second regions includes at least two first regions of the plurality of first regions, and in the first forming, a scanning direction in scanning exposure performed by the scanning exposure apparatus is allocated to each of the at least two first regions,
• a combination of the scanning directions allocated to the at least two first regions is common to the plurality of second regions, and
• the combination is determined such that the scanning directions of at least first regions, of the at least two first regions, which are arranged in a direction perpendicular to the scanning directions are alternately changed one by one.