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US 2020/0026002 A1Published application
Compact and low loss y-junction for submicron silicon waveguide
AssigneeElenion Technologies, LLC
InventorsYang Liu, Yangjin Ma, Ruizhi Shi, Michael J. Hochberg, Yi Zhang, Shuyu Yang, Thomas Wetteland Baehr-Jones
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Abstract
A compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguides. The design was performed using FDTD and particle swarm optimization (PSO). The device was fabricated in a 248 nm CMOS line. Measured average insertion loss is 0.28±0.02 dB across an 8-inch wafer. The device footprint is less than 1.2 μm×2 μm, orders of magnitude smaller than MMI and directional couplers.
Claims21
1-8. (canceled)
An optical splitter device comprising:
- at least one input port for inputting an optical signal in a propagation direction;
- a plurality of output ports for outputting a plurality of portions of the optical signal;
- a tapered section between the at least one input port and the plurality of output ports;
- wherein the tapered section increases in width from the at least one input port to a maximum width, and decreases in width from the maximum width towards the plurality of output ports, whereby the maximum width is greater than the width proximate the plurality of output ports.
1 more element
A method of fabricating an optical splitter comprising:
- providing a substrate with a device layer thereon;
- patterning an optical splitter device in the device layer comprising:
- at least one input port for inputting an optical signal in a propagation direction;
- a plurality of output ports for outputting a plurality of portions of the optical signal;
- a tapered section between the at least one input port and the plurality of output ports;
- wherein the tapered section increases in width from the at least one input port to a maximum width, and decreases in width from the maximum width towards the plurality of output ports, whereby the maximum width is greater than the width proximate the plurality of output ports;
- dry etching to define the optical splitter;
- and
- depositing a top cladding over the optical splitter.
6 more elements
Dependencies are inferred from the claim text.