Probe systems and methods for collecting an optical image of a device under test

A probe system, comprising:

• a chuck defining a support surface configured to support a substrate;
• a chuck thermal module configured to regulate a temperature of the chuck;
• an enclosure defining:
• (i) an enclosed volume that contains the support surface of the chuck;
• and
• (ii) an aperture defined within a portion of the enclosure that faces toward the support surface of the chuck;
• an imaging device at least partially external to the enclosed volume and configured to generate an optical image of at least a portion of the substrate via an optical pathway that extends from the support surface and toward the aperture, wherein the enclosure and the imaging device define a gap therebetween, wherein the gap at least partially defines a fluid conduit that permits fluid flow, via the aperture, between the enclosed volume and an external region that is external the enclosed volume;
• and
• a flow-regulating structure configured to regulate fluid flow through the fluid conduit.