Apparatus and method for a scanning probe microscope

A method for examining a sample surface with a scanning probe microscope, the method comprising the steps of:

• a. directing at least one first light beam from at least one first interferometer onto at least one first reflective area arranged in the region of a free end of at least one first cantilever, which has a first measuring tip;
• b. directing at least one second light beam from at least one second interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, wherein the at least one first reflective area reflects the at least one first light beam and the at least one second light beam in different directions;
• and
• c. using the at least one first light beam reflected by the at least one first reflective area and the at least one second light beam reflected by the at least one first reflective area for the purposes of examining the sample surface.

A computer program comprising instructions which, when they are executed by an apparatus for a scanning probe microscope, the apparatus comprising:

• a1. at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip,
• b1. at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions, and
• c1. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip,
• cause the apparatus to perform method steps comprising:
• a2. directing at least one first light beam from at least one first interferometer onto at least one first reflective area arranged in the region of a free end of at least one first cantilever, which has a first measuring tip,
• b2. directing at least one second light beam from at least one second interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, wherein the at least one first reflective area reflects the at least one first light beam and the at least one second light beam in different directions, and
• c2. using the at least one first light beam reflected by the at least one first reflective area and the at least one second light beam reflected by the at least one first reflective area for the purposes of examining the sample surface.

A method for adapting scan parameters of at least one measuring probe of a scanning probe microscope to a sample to be examined, wherein the method comprises the steps of:

• a. obtaining first data of a sample to be examined;
• b. determining a variable for describing a contour of at least one portion of a sample surface of the sample to be examined from the first data;
• and
• c. determining a spacing between adjacent measurement points of the at least one measuring probe of the scanning probe microscope from the determined variable.

A computer program comprising instructions which, when executed by a computer system, prompt the computer system to carry out a process for adapting scan parameters of at least one measuring probe of a scanning probe microscope to a sample to be examined, the process comprising:

• a. obtaining first data of a sample to be examined;
• b. determining a variable for describing a contour of at least one portion of a sample surface of the sample to be examined from the first data;
• and
• c. determining a spacing between adjacent measurement points of the at least one measuring probe of the scanning probe microscope from the determined variable.