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US 2020/0025790 A1Published application
In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry
AssigneeHoneywell International Inc.
InventorJohn Reinke
Life of this patent
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Abstract
A vibrating beam accelerometer (VBA) with an in-plane translational proof mass that may include at least two or more resonators and be built with planar geometry, discrete lever arms, four-fold symmetry and a single primary mechanical anchor between the support base and the VBA. In some examples, the VBA of this disclosure may be built according to a micro-electromechanical systems (MEMS) fabrication process. Use of a single primary mechanical anchor may minimize bias errors that can be caused by external mechanical forces applied to the circuit board, package, and/or substrate that contains the accelerometer mechanism.
Claims20
A device comprising:
- a translational proof mass;
- a support base defining a first plane;
- an anchor connection structure mechanically connected to the support base with an anchor, wherein the anchor connection structure is in a second plane parallel to the first plane;
- a lever arm mechanically connected to the anchor connection structure at a fulcrum of the lever arm,
- wherein a first end of the lever arm is mechanically connected to the translational proof mass, and
- wherein the lever arm is in the second plane;
- a resonator configured to:
- connect a second end of the lever arm to the anchor;
- receive a force from the lever arm when the translational proof mass is accelerated;
- and
- flex in the second plane based on the received force, wherein the resonator resonates at a driven resonant frequency and the force from the lever arm causes a change in frequency of the resonator;
- wherein the translational proof mass, the lever arm and the resonator are in the second plane.
9 more elements
A system comprising
- a translational vibrating beam accelerometer (VBA), comprising:
- a translational proof mass;
- a support base defining a first plane;
- an anchor connection structure mechanically connected to the support base with an anchor, wherein the anchor connection structure is in a second plane parallel to the first plane;
- a lever arm mechanically connected to the anchor connection structure at a fulcrum of the lever arm,
- wherein a first end of the lever arm is mechanically connected to the translational proof mass, and
- wherein the lever arm is in the second plane;
- a resonator configured to:
- connect a second end of the lever arm to the anchor;
- receive a force from the lever arm when the translational proof mass is accelerated;
- and
- flex in the second plane based on the received force, wherein the resonator resonates at a driven resonant frequency and the received force from the lever arm causes a change in frequency of the resonator;
- wherein the translational proof mass, the lever arm and the resonator are in the second plane;
- a signal generation circuit operatively connected to the translational VBA;
- processing circuitry operatively connected to the translational VBA and the signal generation circuit,
- wherein:
- the signal generation circuit is configured to output a first signal that causes the two or more resonators of the translational VBA to vibrate at a respective resonant frequency of each of the resonators,
- an acceleration of the translational VBA in a direction substantially parallel to the second plane causes the first resonator and the second resonator to receive a force, such that the force causes a respective change in resonant frequency of at least one resonator of the first resonator and the second resonator,
- the processing circuitry is configured to receive a second signal from the translational VBA indicative of a respective change in the resonant frequency and based on the respective change in resonant frequency, determine an acceleration measurement.
16 more elements
A method comprising:
- maintaining, by a plurality of electrodes, resonance of a first resonator and a second resonator of a translational vibrating beam accelerometer (VBA), wherein the translational VBA comprises:
- a translational proof mass;
- a support base defining a first plane;
- an anchor connection structure mechanically connected to the support base with an anchor, wherein the anchor connection structure is in a second plane parallel to the first plane;
- a lever arm mechanically connected to the anchor connection structure at a fulcrum of the lever arm,
- wherein a first end of the lever arm is mechanically connected to the translational proof mass, and
- wherein the lever arm is in the second plane;
- a resonator configured to:
- connect a second end of the lever arm to the anchor;
- receive a force from the lever arm when the translational proof mass is accelerated;
- and
- flex in the second plane based on the received force, wherein the resonator resonates at a driven resonant frequency and the received force from the lever arm causes a change in frequency of the resonator;
- wherein the translational proof mass, the lever arm and the resonator are in the second plane;
- receiving, by the first resonator, in response to an acceleration of the translational VBA substantially parallel to the second plane, a first force;
- receiving, by a second resonator, in response to the acceleration of the translational VBA substantially parallel to the second plane, a second force;
- detecting, by the plurality of electrodes, respective signals that are indicative of a respective change in the resonant frequency of each of the first and second resonators caused by the first force and the second force;
- and
- outputting, by the translational VBA, the respective signals.
15 more elements
Dependencies are inferred from the claim text.