Method of using integrated electro-microfluidic probe card
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Shao LIU, Fei-Lung LAI, Chun-Ren CHENG, Chun-Wen CHENG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Shao LIU, Fei-Lung LAI, Chun-Ren CHENG, Chun-Wen CHENG
Estimating the term…
A method includes mounting an integrated electro-microfluidic probe card to a device area on a bio-sensor device wafer, wherein the electro-microfluidic probe card has a first major surface and a second major surface opposite the first major surface. The method further includes electrically connecting at least one electronic probe tip extending from the first major surface to a corresponding conductive area of the device area. The method further includes stamping a test fluid onto the device area. The method further includes measuring via the at least one electronic probe tip a first electrical property of one or more bio-FETs of the device area based on the test fluid.
A method comprising:
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A method comprising:
Dependencies are inferred from the claim text.