Capacitive gas sensors and manufacturing method thereof

A capacitive gas sensor comprising:

• a first electrode;
• a second electrode;
• and
• a gas-sensitive dielectric material arranged between the first and the second electrodes to form a gas sensitive capacitor, the gas-sensitive dielectric material being adapted to absorb a gas compound from an environmental medium and has a permittivity that depends on an amount of absorbed gas compound;
• the gas-sensitive dielectric material comprises a polymer material from an additived polymer grade, the polymers of the additived polymer grade including a cross-linking additive adapted to pin the chains of the polymer material for increasing the resistance to a change of chain orientation under thermally-induced mechanical stress from the at least one of the first and second electrodes.

A method of manufacturing a capacitive gas sensor having a first electrode, a second electrode, and a gas-sensitive dielectric material arranged between the first and the second electrodes, the gas-sensitive dielectric material having a permittivity that depends on an amount of gas compound absorbed from an environmental medium, the method comprising:

• providing the second electrode;
• forming the gas-sensitive dielectric material onto the second electrode;
• depositing a dielectric-electrode interfacing material to cover an area of the gas-sensitive dielectric material;
• and
• depositing the first electrode onto said area covered by the dielectric-electrode interfacing material;
• wherein the dielectric-electrode interfacing material is selected as a dielectric polymer material adapted to absorb thermally-induced dilatation of the at least one of the first and second electrodes for reducing the mechanical stress applied on the gas-sensitive dielectric material.