Substrate inspection method and substrate inspection apparatus
AssigneeTokyo Electron Limited
InventorsKazuya HISANO, Akiko KIYOTOMI
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Abstract
A substrate inspection method includes: acquiring a feature amount of each of divided areas in an inspection target peripheral edge image, the inspection target peripheral edge image being an image of a peripheral portion of a target substrate as an inspection target, the divided areas being obtained by dividing a predetermined area in the image of the peripheral portion of the target substrate into a plurality of areas; and performing a predetermined determination concerning inspection of the peripheral portion of the target substrate based on an acquisition result in the acquiring the feature amount.
Claims10
A substrate inspection method comprising:
- acquiring a feature amount of each of divided areas in an inspection target peripheral edge image, the inspection target peripheral edge image being an image of a peripheral portion of a target substrate as an inspection target, the divided areas being obtained by dividing a predetermined area in the image of the peripheral portion of the target substrate into a plurality of areas;
- and
- performing a predetermined determination concerning inspection of the peripheral portion of the target substrate based on an acquisition result in the acquiring the feature amount.
A substrate inspection apparatus comprising:
- a feature amount acquisition part configured to acquire a feature amount of each of divided areas in an inspection target peripheral edge image, the inspection target peripheral edge image being an image of a peripheral portion of a substrate as an inspection target, the divided areas being obtained by dividing a predetermined area in the image of the peripheral portion of the substrate into a plurality of areas;
- and
- a determination part configured to perform a predetermined determination concerning inspection of the peripheral portion of the substrate based on an acquisition result in the feature amount acquisition part.
Dependencies are inferred from the claim text.