Euv vessel inspection method and related system

A method, comprising:

• moving an inspection tool from a storage position to an image capture position within an extreme ultraviolet (EUV) vessel;
• while the inspection tool is disposed at the image capture position, capturing an image of an entirety of the interior of the EUV vessel;
• and
• after capturing the image of the entirety of the interior of the EUV vessel, moving the inspection tool from the image capture position to the storage position within the EUV vessel;
• wherein a level of tin contamination on different components of the EUV vessel is quantified using the image of the entirety of the interior of the EUV vessel.

An inspection system, comprising:

• an extreme ultraviolet (EUV) vessel configured for use as part of an EUV light source;
• and
• an inspection tool including a panoramic camera retractably coupled to a side of the EUV vessel;
• wherein the panoramic camera is configured to capture a skydome view image of an interior portion of the EUV vessel using a single shot of the panoramic camera;
• and
• wherein an image processing system is configured to transform the skydome view image into a plane surface image and quantify a level of tin contamination on the interior portion of the EUV vessel based on the plane surface image.