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AssigneeShibaura Mechatronics Corporation
InventorsMasataka YOKOI, Nobuo KOBAYASHI, Masaaki FURUYA, Atsushi KINASE
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According to one of embodiments, a gas leak detecting device of a heater pipe and a gas leak detecting method of a heater pipe which are able to reliably detect a leak of gas from a heater pipe in which a fine hole is formed are provided. There is provided a gas leak detecting device of a heater pipe 10 which is provided with an inside pipe 10a housing a heater element and an outside pipe 10b sealed surrounding this inside pipe and which is adjusted through piping 30 by a pressure adjustment mechanism 20 in gas pressure in a space between the outside pipe 10b and the inside pipe 10a to a predetermined pressure value, comprising a gas flow resistance part 21 (213) provided at the piping 30 and locally resistant to flow of gas, a pressure detection unit 23 detecting gas pressure of a space between the outside pipe 10b and the inside pipe 10a between the gas flow resistance part 21 and the heater pipe 10 in the piping 30, and a leak judging means 50 for judging whether gas is leaking from the heater pipe 10 based on a detected pressure value obtained by the pressure detection unit 23.
A gas leak detecting device of a heater pipe which is provided with an inside pipe housing a heater element and an outside pipe sealed surrounding the inside pipe, is coupled by piping with a pressure adjustment mechanism, and is adjusted by the pressure adjustment mechanism in gas pressure in a space between the outside pipe and the inside pipe to a predetermined pressure value, the gas leak detecting device comprising:
A gas leak detecting method of a heater pipe which is provided with an inside pipe housing a heater element and an outside pipe sealed surrounding this inside pipe, is coupled by piping with a pressure adjustment mechanism, and is adjusted by the pressure adjustment mechanism in gas pressure in a space between the outside pipe and the inside pipe to a predetermined pressure value, the gas leak detecting method comprising:
Dependencies are inferred from the claim text.