Back to results
US 2020/0025635 A1Published application
Pressure sensor
AssigneeElectronics and Telecommunications Research Institute
InventorJin Tae KIM
Life of this patent
Estimating the term…
Abstract
Provided is a pressure sensor including a first optical waveguide inside a lower substrate, a graphene layer above the lower substrate, an upper substrate above the graphene layer, and spacers between the lower substrate and the upper substrate.
Claims20
A pressure sensor comprising:
- a first optical waveguide inside a lower substrate;
- a graphene layer on the lower substrate;
- an upper substrate on the graphene layer;
- and
- spacers between the lower substrate and the upper substrate.
2 more elements
A pressure sensor comprising:
- a lower substrate comprising an optical waveguide;
- an upper substrate on the lower substrate;
- and
- a graphene layer between the lower substrate and the upper substrate,
- wherein the upper substrate comprises:
- an upper portion;
- and
- a first lower portion and second lower portions that protrude from a bottom surface of the upper portion, and
- the first lower portion is disposed between the second lower portions.
6 more elements
Dependencies are inferred from the claim text.