Method and Device for Imaging a Specimen Surface
AssigneeWitec Wissenschaftliche Instrumente und Technologie GmbH
InventorsPeter SPIZIG, Olaf HOLLRICHER, Wolfram IBACH
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Abstract
A method and a device are provided which enables a simple and fast Raman and/or fluorescence measurement even on uneven specimen surfaces; additionally, the invention should make it possible to confocally image a plane or a surface, in particular a surface of a specimen, i.e. with the aid of confocal microscopy.
Claims20
A method for imaging a surface of a sample with a topography by means of confocal Raman and/or fluorescence microscopy, in which a first light source is provided for generating excitation radiation for Raman scattered light and/or fluorescence and a second light source,
- characterized in that:
- the first light source emits light in a first wavelength range, wherein the limits of the first wavelength range are defined by the limits of the emitted luminescence spectrum and/or Raman spectrum of the sample to be examined,
- the light from the first light source is directed onto the sample by means of optics,
- the second light source emits light in a second wavelength range;
- wherein the second wavelength range lies above or below the first wavelength range without overlaps with the first wavelength range;
- and
- the light of the second light source with the optics and a periodically excited lens is brought onto the surface of the sample, resulting in a periodic focus, such that
- the topography of the sample is determined from the signal of the focal plane of the second light source and the detected light of the second light source with the aid of a control/regulating device, and the focus of the first light source is tracked by means of the optics on the basis of this signal and is applied to the sample, and the modulation range of the periodic focus of the second light source is tracked by means of the optics on the basis of the signal.
A device for imaging the surfaces of a sample with a topography by means of confocal Raman and/or fluorescence microscopy, comprising:
- a first light source for Raman scattered light and/or fluorescence, and a second light source,
- characterized in that
- the first light source emits light in a first wavelength range, wherein the limits of the first wavelength range are defined by the limits of the emitted luminescence spectrum and/or Raman spectrum of the sample to be examined,
- the second light source emits light in a second wavelength range;
- wherein the second wavelength range lies above or below the first wavelength range without overlaps with the first wavelength range;
- the light from the first light source and the second light source is guided through the same optics, and
- the device comprises a focusable lens for bringing the focal plane of the second light source into/onto the surface of the sample;
- and
- a control/regulating device which determines the topography of the sample from a signal of the focal plane of the second light source and moves the sample into a focal plane of the first light source on the basis of this signal and the detected light of the second light source.
Dependencies are inferred from the claim text.