Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

A method for operating a capacitive RFMEMS, the capacitive RFMEMS comprising:

• a substrate;
• a first electrode connected to the substrate;
• a flexible membrane, wherein the flexible membrane is at least partially spatially separated from the first electrode;
• a second electrode connected to the flexible membrane;
• and
• a dielectric stack disposed between the first electrode and the second electrode and flexible membrane, comprising:
• a first dielectric layer, wherein the first dielectric layer has a first level of electrically active defects;
• and
• a second dielectric layer, wherein the second dielectric layer has a second level of electrically active defects, lower than the first,
• the method comprising:
• providing a bias voltage to the first electrode of the capacitive RFMEMS, thereby creating an electric field between the first and second electrode, wherein the bias voltage is adapted to drive the capacitive RFMEMS into a collapse mode;
• providing a stimulus voltage to the second electrode, thereby increasing an electric field between the first and second electrode;
• polarizing the first dielectric layer to a first degree of polarization and the second dielectric layer to a second degree of polarization, lower than the first degree, thereby causing a negative drift in the bias voltage between the first and second electrodes;
• and
• orienting space charges within the first dielectric layer to a first level of orientation and within the second dielectric layer to a second level of orientation, greater than the first level, thereby causing a positive drift in the bias voltage between the first and second electrodes, thereby minimizing the overall drift in bias voltage between the first and second electrodes.