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US 2020/0013579 A1Published application
Magnetically Microfocused Electron Emission Source
AssigneeKLA-Tencor Corporation
InventorChristopher Sears
Life of this patent
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Abstract
A magnetically microfocused electron emission source apparatus is disclosed. The apparatus may include a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter. Further, the magnetic emitter unit may include one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter.
Claims21
An apparatus comprising:
- a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter, wherein the magnetic emitter unit comprises one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter.
An apparatus comprising:
- an electron source including a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter, wherein the magnetic emitter unit comprises one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter;
- an electron-optical column including a set of electron-optical elements configured to direct the electron beam onto a sample;
- and
- a detector assembly configured to detect an electron signal from the sample.
1 more element
A method comprising:
- emitting a particle beam from a tip of an electron emitter;
- and
- generating a magnetic field proximate to the tip of the electron emitter, with at least one of a magnetic portion of the electron emitter or a magnetic sleeve surrounding the electron emitter, to enhance focusing of the emitted electrons from the electron emitter.
Dependencies are inferred from the claim text.