Acoustic microelectronic device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsStephane FANGET, Caroline COUTIER, Philippe ROBERT
Life of this patent
Estimating the term…
Abstract
An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.
Claims19
An acoustic-type microelectronic device comprising a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane, the device comprising at least one bridge connecting the portions of two edges opposite the trench in order to connect the support to the anchoring zone of the membrane, the bridge being located overhanging at least one zone of the trench so as to form, in said zone of the trench, an acoustic insulation box below the bridge.
A method for producing an acoustic-type microelectronic device comprising, on the base of a support, a production of a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone and of at least one acoustic insulation trench arranged adjacent to the membrane, the method comprising the production of at least one bridge connecting the portions of two opposite edges of the trench in order to connect the support to the anchoring zone of the membrane, the bridge being located overhanging at least one zone of the trench so as to form, in said zone of the trench, an acoustic insulation box below the bridge.
Dependencies are inferred from the claim text.