US 2020/0007109 A1 · ACOUSTIC WAVE DEVICE, MULTIPLEXER, HIGH-FREQUENCY FRONT-END CIRCUIT, AND COMMUNICATION APPARATUS

Abstract

An acoustic wave device includes a silicon oxide film, a piezoelectric body made of lithium tantalate, and interdigital transducer electrodes stacked on a supporting substrate made of silicon, in which the values of the wave length-normalized film thickness and the Euler angle of the piezoelectric body made of lithium tantalate, the wave length-normalized film thickness of the silicon oxide film, the wave length-normalized film thickness of the interdigital transducer electrodes in terms of aluminum thickness, the propagation direction of the supporting substrate, and the wave length-normalized film thickness of the supporting substrate are set such that represented by Formula (1) for at least one of responses of first, second, and third higher-order modes is more than about −2.4, and TSi>20.

An acoustic wave device, comprising:

a supporting substrate made of silicon;
a silicon oxide film stacked on or above the supporting substrate;
a piezoelectric body stacked on or above the silicon oxide film, the piezoelectric body being made of lithium tantalate;
and
interdigital transducer electrodes disposed on or above a main surface of the piezoelectric body;
wherein
where a wave length determined by a pitch of electrode fingers of the interdigital transducer electrodes is denoted by λ, a wave length-normalized film thickness of the piezoelectric body is denoted by TLT, an Euler angle θ of the piezoelectric body is denoted by θLT, a wave length-normalized film thickness of the silicon oxide film is denoted by TS, a wave length-normalized film thickness of the interdigital transducer electrodes in terms of aluminum thickness is denoted by TE, a propagation direction in the supporting substrate is denoted by ψSi, and a wave length-normalized film thickness of the supporting substrate is denoted by TSi, TLT, θLT, TS, TE, and ψSi are set such that Ih represented by Formula (1) below for at least one of responses of a first higher-order mode, a second higher-order mode, and a third higher-order mode is more than about −2.4, and TSi>20;
I
h
=
a
T
LT
(
2
)

(
(
T
LT
-
c
T
LT
)
2
-
b
T
LT
(
2
)
)
+
a
T
LT
(
1
)

(
T
LT
-
c
T
LT
)
+
a
T
S
(
2
)

(
(
T
S
-
c
T
S
)
2
-
b
T
LT
(
2
)
)
+
a
T
S
(
1
)

(
T
S
-
c
T
S
)
+
a
T
E
(
4
)

(
(
T
E
-
c
T
E
)
4
-
b
T
E
(
4
)
)
+
a
T
E
(
3
)

(
(
T
E
-
c
T
E
)
3
-
b
T
E
(
3
)
)
+
a
T
E
(
2
)

(
(
T
E
-
c
T
E
)
2
-
b
T
E
(
2
)
)
+
a
T
E
(
1
)

(
T
E
-
c
T
E
)
+
a
ψ
Si
(
6
)

(
(
ψ
Si
-
c
ψ
Si
)
6
-
b
ψ
Si
(
6
)
)
+
a
ψ
Si
(
5
)

(
(
ψ
Si
-
c
ψ
Si
)
2
-
b
ψ
Si
(
5
)
)
+
a
ψ
Si
(
4
)

(
(
ψ
Si
-
c
ψ
Si
)
2
-
b
ψ
Si
(
4
)
)
+
a
ψ
Si
(
3
)

(
(
ψ
Si
-
c
ψ
Si
)
2
-
b
ψ
Si
(
3
)
)
+
a
ψ
Si
(
2
)

(
(
ψ
Si
-
c
ψ
Si
)
2
-
b
ψ
Si
(
2
)
)
-
a
ψ
Si
(
1
)

(
ψ
Si
-
c
ψ
Si
)
+
a
θ
LT
(
2
)

(
(
θ
LT
-
c
θ
LT
)
2
-
b
θ
LT
(
2
)
)
+
a
θ
LT
(
1
)

(
θ
LT
-
c
θ
LT
)
+
d
T
LT

T
S

(
T
LT
-
c
T
LT
)

(
T
S
-
c
T
S
)
+
d
T
LT

T
E

(
T
LT
-
c
T
LT
)

(
T
E
-
c
T
E
)
+
d
T
LT

ψ
Si

(
T
LT
-
c
T
LT
)

(
ψ
Si
-
c
ψ
Si
)
+
d
T
LT

θ
LT

(
T
LT
-
c
T
LT
)

(
θ
LT
-
c
θ
LT
)
+
d
T
S

T
E

(
T
S
-
c
T
S
)

(
T
E
-
c
T
E
)
+
d
T
S

ψ
Si

(
T
S
-
c
T
S
)

(
ψ
Si
-
c
ψ
Si
)
+
d
T
S

θ
LT

(
T
S
-
c
T
S
)

(
θ
LT
-
c
θ
LT
)
+
d
T
E

ψ
Si

(
T
E
-
c
T
E
)

(
ψ
Si
-
c
ψ
Si
)
+
d
T
E

θ
LT

(
T
E
-
c
T
E
)

(
θ
LT
-
c
θ
LT
)
+
d
ψ
Si

θ
LT

(
ψ
Si
-
c
ψ
Si
)

(
θ
LT
-
c
θ
LT
)
+
e
;
Formula


(
1
)
where coefficients a, b, c, d, and e in Formula (1) are values presented in Tables 1 to 36 below in accordance with ranges of orientation of the supporting substrate either of (100), (110), or (111), a type of higher-order mode, the wave length-normalized film thickness of the silicon oxide film, the wave length-normalized film thickness of the piezoelectric body, and the propagation direction in the supporting substrate;
TABLE 1
Si(100)
First higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
0
0
bTLT(2)
0
0
cTLT
0
0
aTS(2)
0
0
aTS(1)
−5.857231176
−5.857231176
bTS(2)
0
0
cTS
0.148
0.148
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
−19.75255913
−19.75255913
aTE(1)
−2.877583447
−2.877583447
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.022736
0.022736
cTE
0.242
0.242
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.004788767
0.004788767
aψSi(1)
0.024306207
0.024306207
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
81.81
81.81
cψSi
8.7
8.7
aθLT(2)
−0.008235936
−0.008235936
aθLT(1)
−0.021048278
−0.021048278
bθLT(2)
65.16
65.16
cθLT
−52.2
−52.2
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
−0.786852571
−0.786852571
dTEψSi
0
0
dTEθLT
−0.237034335
−0.237034335
dψSiθLT
0
0
e
−1.499248378
−1.499248378;
TABLE 2
Si(100)
First higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
125.5342427
aTLT(1)
−13.43961051
−7.643409732
bTLT(2)
0
0.006076558
cTLT
0.329807692
0.321186441
aTS(2)
0
0
aTS(1)
−11.80744788
−10.05306878
bTS(2)
0
0
cTS
0.158653846
0.153389831
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
0
−7.595099843
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0
0.366101695
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.003335792
0
aψSi(1)
0.039268266
−0.013700762
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
191.7159763
0
cψSi
13.26923077
16.01694915
aθLT(2)
−0.007476194
0
aθLT(1)
−0.010867175
−0.053997369
bθLT(2)
69.19378698
0
cθLT
−50.19230769
−50.59322034
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
−0.629167148
−0.724576033
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0.521919406
dTSθLT
0
0
dTEψSi
0
−0.523966449
dTEθLT
0
0
dψSiθLT
0
0
e
−2.071831837
−3.228508418;
TABLE 3
Si(100)
First higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−15.6141248
−15.6141248
bTLT(2)
0
0
cTLT
0.163309353
0.163309353
aTS(2)
0
0
aTS(1)
−22.02440893
−22.02440893
bTS(2)
0
0
cTS
0.325179856
0.325179856
aTE(4)
0
0
aTE(3)
−248.4374004
−248.4374004
aTE(2)
−36.57127964
−36.57127964
aTE(1)
13.88180854
13.88180854
bTE(4)
0
0
bTE(3)
0.000480119
0.000480119
bTE(2)
0.020416128
0.020416128
cTE
0.240647482
0.240647482
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.002456326
0.002456326
aψSi(1)
0.048553126
0.048553126
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
279.6050929
279.6050929
cψSi
22.3381295
22.3381295
aθLT(2)
0
0
aθLT(1)
0.005427275
0.005427275
bθLT(2)
0
0
cθLT
−50.35971223
−50.35971223
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
41.63149071
41.63149071
dTSψSi
−0.577179204
−0.577179204
dTSθLT
0.603866778
0.603866778
dTEψSi
0.134944598
0.134944598
dTEθLT
0
0
dψSiθLT
0
0
e
−2.703317679
−2.703317679;
TABLE 4
Si(100)
First higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
133.7896555
aTLT(1)
−7.761727985
−9.701155851
bTLT(2)
0
0.006281971
cTLT
0.315508021
0.306914894
aTS(2)
0
0
aTS(1)
−20.35135077
−6.186650236
bTS(2)
0
0
cTS
0.297860963
0.298404255
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
110.8304316
0
aTE(1)
4.036561723
−8.229960495
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.006431411
0
cTE
0.140374332
0.363297872
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.002534654
0.001652947
aψSi(1)
0.024168138
−0.003241344
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
269.2484772
266.6845858
cψSi
21.4171123
20.26595745
aθLT(2)
0
0
aθLT(1)
0
−0.066116428
bθLT(2)
0
0
cθLT
−90
−50.4787234
dTLTTS
96.23533718
0
dTLTTE
−66.46866878
0
dTLTψSi
−0.404808481
−0.688053172
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
−0.733337318
0
dTSθLT
0
0
dTEψSi
0.584322518
−0.372994212
dTEθLT
0
0
dψSiθLT
0
0
e
−3.679364607
−4.30794513;
TABLE 5
Si(100)
Second higher-order mode
0 < TLT < 0.2
0 ≤ TS < 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−5.687707928
−5.687707928
bTLT(2)
0
0
cTLT
0.139506173
0.139506173
aTS(2)
0
0
aTS(1)
5.653643283
5.653643283
bTS(2)
0
0
cTS
0.148148148
0.148148148
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
−1.004369706
−1.004369706
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0.255555556
0.255555556
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
−0.000197083
−0.000197083
aψSi(2)
−0.003376583
−0.003376583
aψSi(1)
0.118081927
0.118081927
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
−379.4708632
−379.4708632
bψSi(2)
278.0521262
278.0521262
cψSi
23.14814815
23.14814815
aθLT(2)
0
0
aθLT(1)
0.128631041
0.128631041
bθLT(2)
0
0
cθLT
−49.32098765
−49.32098765
dTLTTS
0
0
dTLTTE
72.43278274
72.43278274
dTLTψSi
0.604747502
0.604747502
dTLTθLT
−1.743618251
−1.743618251
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0.994157261
0.994157261
dTEψSi
0
0
dTEθLT
0.280889881
0.280889881
dψSiθLT
0.003095822
0.003095822
e
−5.638096455
−5.638096455;
TABLE 6
Si(100)
Second higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
7.809960834
4.249755245
bTLT(2)
0
0
cTLT
0.30962963
0.302857143
aTS(2)
0
0
aTS(1)
0
−0.800874586
bTS(2)
0
0
cTS
0
0.150714286
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
−3.563479635
9.07053135
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0.148518519
0.353571429
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
−0.000160979
0
aψSi(2)
−0.000757552
0.001332545
aψSi(1)
0.095765615
0.003836714
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
384.7407407
0
bψSi(2)
278.2222222
285.0956633
cψSi
21.33333333
20.89285714
aθLT(2)
0
0
aθLT(1)
0.043185248
0.033521037
bθLT(2)
0
0
cθLT
−50
−50.92857143
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
−0.383208698
−0.220029295
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0
0.974573109
dTEψSi
0
0
dTEθLT
1.01389349
−1.078939399
dψSiθLT
0
0.002899732
e
−5.569590226
−5.29442278;
TABLE 7
Si(100)
Second higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−11.51287
−11.51287
bTLT(2)
0
0
cTLT
0.136328125
0.136328125
aTS(2)
0
0
aTS(1)
6.022608826
6.022608826
bTS(2)
0
0
cTS
0.305859375
0.305859375
aTE(4)
0
0
aTE(3)
−180.607873
−180.607873
aTE(2)
−1.347493816
−1.347493816
aTE(1)
4.841204365
4.841204365
bTE(4)
0
0
bTE(3)
−0.000227051
−0.000227051
bTE(2)
0.019179688
0.019179688
cTE
0.25625
0.25625
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
−0.001342794
−0.001342794
aψSi(1)
0.25625
0.25625
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
275.7568359
275.7568359
cψSi
0.25625
0.25625
aθLT(2)
0
0
aθLT(1)
0.153688205
0.153688205
bθLT(2)
0
0
cθLT
−49.140625
−49.140625
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
0
0
dTLTθLT
−1.180623763
−1.180623763
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0
0
dTEψSi
0
0
dTEθLT
0.41394071
0.41394071
dψSiθLT
0.003203013
0.003203013
e
−4.433641408
−4.433641408;
TABLE 8
Si(100)
Second higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
119.666412
118.2359738
aTLT(1)
4.447768142
2.271979446
bTLT(2)
0.006371047
0.00699901
cTLT
0.31147541
0.30631068
aTS(2)
0
0
aTS(1)
0
−3.805216895
bTS(2)
0
0
cTS
0
0.298543689
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
117.8354557
121.7109482
aTE(1)
2.107193686
−0.578851453
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.006775956
0.006610661
cTE
0.15
0.35631068
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
−0.001658706
0
aψSi(1)
0.005677734
0.003834195
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
272.5477022
0
cψSi
20.90163934
20.02427184
aθLT(2)
0
0
aθLT(1)
0.051921544
0.050011808
bθLT(2)
0
0
cθLT
−48.36065574
−48.93203883
dTLTTS
0
0
dTLTTE
61.26575286
0
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
−82.22932804
dTSψSi
0
0
dTSθLT
0
−0.470524678
dTEψSi
0
0
dTEθLT
0.904198722
−0.776132158
dψSiθLT
0.003410501
0.003906326
e
−5.339814906
−5.463687811;
TABLE 9
Si(100)
Third higher-order mode
0 < TLT < 0.2
0 ≤ TS < 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−16.39135605
−16.39135605
bTLT(2)
0
0
cTLT
0.196774194
0.196774194
aTS(2)
0
0
aTS(1)
−4.824831305
−4.824831305
bTS(2)
0
0
cTS
0.170967742
0.170967742
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
−45.57608817
−45.57608817
aTE(1)
−10.80005563
−10.80005563
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.018296046
0.018296046
cTE
0.303225806
0.303225806
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0.000172048
0.000172048
aψSi(2)
−0.00384923
−0.00384923
aψSi(1)
−0.009826773
−0.009826773
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
143.0843208
143.0843208
bψSi(2)
215.8688866
215.8688866
cψSi
22.25806452
22.25806452
aθLT(2)
0
0
aθLT(1)
0.066799879
0.066799879
bθLT(2)
0
0
cθLT
−50.16129032
−50.16129032
dTLTTS
0
0
dTLTTE
−112.847682
−112.847682
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
−1.750763196
−1.750763196
dTSθLT
0
0
dTEψSi
0
0
dTEθLT
0.466692151
0.466692151
dψSiθLT
0
0
e
−2.904746788
−2.904746788;
TABLE 10
Si(100)
Third higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−8.135537689
−8.135537689
bTLT(2)
0
0
cTLT
0.311659193
0.311659193
aTS(2)
0
0
aTS(1)
−20.38200282
−20.38200282
bTS(2)
0
0
cTS
0.149327354
0.149327354
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
−3.460675692
−3.460675692
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0.267488789
0.267488789
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
−0.003759233
−0.003759233
aψSi(1)
0.015931998
0.015931998
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
239.0395946
239.0395946
cψSi
18.90134529
18.90134529
aθLT(2)
0
0
aθLT(1)
0.017576249
0.017576249
bθLT(2)
0
0
cθLT
−49.9103139
−49.9103139
dTLTTS
−152.1817236
−152.1817236
dTLTTE
0
0
dTLTψSi
−0.359387178
−0.359387178
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0.911415415
0.911415415
dTEψSi
0
0
dTEθLT
0.275815872
0.275815872
dψSiθLT
0
0
e
−3.952626598
−3.952626598;
TABLE 11
Si(100)
Third higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−26.36951471
−26.36951471
bTLT(2)
0
0
cTLT
0.161538462
0.161538462
aTS(2)
0
0
aTS(1)
−10.09828536
−10.09828536
bTS(2)
0
0
cTS
0.321025641
0.321025641
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
−21.38297597
−21.38297597
aTE(1)
−2.383287449
−2.383287449
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.01947666
0.01947666
cTE
0.270512821
0.270512821
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0.000176024
0.000176024
aψSi(2)
−0.001397911
−0.001397911
aψSi(1)
−0.107515297
−0.107515297
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
−282.3623122
−282.3623122
bψSi(2)
255.2071006
255.2071006
cψSi
23.84615385
23.84615385
aθLT(2)
0
0
aθLT(1)
0.085112984
0.085112984
bθLT(2)
0
0
cθLT
−48.97435897
−48.97435897
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
−0.816828716
−0.816828716
dTLTθLT
0.865519967
0.865519967
dTSTE
0
0
dTSψSi
−0.538336559
−0.538338559
dTSθLT
0
0
dTEψSi
0
0
dTEθLT
0
0
dψSiθLT
0.002971652
0.002971652
e
−3.504362202
−3.504362202;
TABLE 12
Si(100)
Third higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−6.371850196
−6.371850196
bTLT(2)
0
0
cTLT
0.292192192
0.292192192
aTS(2)
0
0
aTS(1)
−0.609606885
−0.609606885
bTS(2)
0
0
cTS
0.2996997
0.2996997
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
0
0
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0
0
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0.000224133
0.000224133
aψSi(2)
−0.004048532
−0.004048532
aψSi(1)
−0.126847922
−0.126847922
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
1375.85979
1375.85979
bψSi(2)
281.2555799
281.2555799
cψSi
19.77477477
19.77477477
aθLT(2)
0
0
aθLT(1)
0.056146223
0.056146223
bθLT(2)
0
0
cθLT
−49.48948949
−49.48948949
dTLTTS
94.47145497
94.47145497
dTLTTE
0
0
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
−0.568942451
−0.568942451
dTEψSi
0
0
dTEθLT
0
0
dψSiθLT
0.005654813
0.005654813
e
−4.940340284
−4.940340284;
TABLE 13
Si(110)
First higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−16.69742899
−16.69742899
−33.56520202
0
bTLT(2)
0
0
0
0
cTLT
0.1675
0.1675
0.192857143
0
aTS(2)
0
0
0
0
aTS(1)
15.90196012
15.90196012
0
0
bTS(2)
0
0
0
0
cTS
0.1525
0.1525
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
26.3030303
0
aTE(1)
0
0
−6.181053391
0
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.006326531
0
cTE
0
0
0.378571429
0
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
−0.000183963
−0.000183963
0
−0.000177142
aψSi(2)
−0.003236307
−0.003236307
0
0.002186084
aψSi(1)
0.071460688
0.071460688
0.085067773
0.13561432
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
−5768.71875
−5768.71875
0
2642.857143
bψSi(2)
399.9375
399.9375
0
500
cψSi
65.25
65.25
34.28571429
55
aθLT(2)
0
0
0
−0.005336622
aθLT(1)
0
0
0.070255628
0.032718563
bθLT(2)
0
0
0
65.75963719
cθLT
−90
−90
−51.42857143
−50.95238095
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
1.873870705
1.873870705
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0.716151515
0
dψSiθLT
0
0
−0.00729303
0.002110378
e
−0.957101918
−0.957101918
−1.634922542
−1.290881853;
TABLE 14
Si(110)
First higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−23.96596978
−4.695531045
−7.344438725
−5.603099398
bTLT(2)
0
0
0
0
cTLT
0.34
0.3296875
0.338983051
0.306666667
aTS(2)
0
0
0
0
aTS(1)
−23.18485905
0
0
0
bTS(2)
0
0
0
0
cTS
0.175555556
0
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
−43.48595551
−70.50554427
−41.95412638
aTE(1)
0
−2.467954545
−5.460437635
−2.19025056
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006875
0.006716461
0.006819556
cTE
0
0.15
0.365254237
0.360666667
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0.000119479
−0.000172812
aψSi(2)
0.018474062
0
0.003987724
0.002213009
aψSi(1)
0.059131688
0
−0.047908658
0.073831446
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
−2384.203107
1647.952
bψSi(2)
81.55555556
0
216.791152
242.24
cψSi
35.33333333
0
30.76271186
62.6
aθLT(2)
0
0
0
0
aθLT(1)
0.009475371
0
0.026725166
0
bθLT(2)
0
0
0
0
cθLT
−49.33333333
−90
−49.83050847
−90
dTLTTS
0
0
0
0
dTLTTE
0
0
0
42.3018696
dTLTψSi
0
0
0
0
dTLTθLT
0.617240199
0
0
0
dTSTE
0
0
0
0
dTSψSi
2.612107038
0
0
0
dTSθLT
2.129359248
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
0.871101002
0
0
0
e
−2.851861362
−2.210765625
−2.573237288
−2.440604203;
TABLE 15
Si(110)
First higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−10.87353735
−17.74612134
−16.74814911
−16.74814911
bTLT(2)
0
0
0
0
cTLT
0.167045455
0.158227848
0.168032787
0.168032787
aTS(2)
92.14417413
275.6432031
0
0
aTS(1)
−6.141913324
−0.713377524
−9.071522271
−9.071522271
bTS(2)
0.004213585
0.004749239
0
0
cTS
0.339772727
0.317721519
0.314754098
0.314754098
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−37.82699975
0
0
0
aTE(1)
4.315324766
3.259148162
−5.270739047
−5.270739047
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.007147469
0
0
0
cTE
0.153409091
0.138607595
0.356557377
0.356557377
aψSi(6)
0
0
−3.73552E−09
−3.73552E−09
aψSi(5)
0
0
−4.69013E−08
−4.69013E−08
aψSi(4)
0
0
1.07773E−05
1.07773E−05
aψSi(3)
0.000254041
−0.000266841
5.64997E−05
5.64997E−05
aψSi(2)
0.00704637
0.003350583
−0.007526984
−0.007526984
aψSi(1)
−0.123432463
0.05687546
−0.035719404
−0.035719404
bψSi(6)
0
0
1801696668
1801696668
bψSi(5)
0
0
6726299.443
6726299.443
bψSi(4)
0
0
1035415.498
1035415.498
bψSi(3)
−1197.310014
2539.305207
3573.665857
3573.665857
bψSi(2)
188.2457386
286.0358917
720.1088417
720.1088417
cψSi
28.125
63.60759494
48.19672131
48.19672131
aθLT(2)
0
0
0
0
aθLT(1)
0.046748629
0.00460971
0
0
bθLT(2)
0
0
0
0
cθLT
−51.59090909
−50.75949367
−90
−90
dTLTTS
0
0
0
0
dTLTTE
0
105.3055279
0
0
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
58.63016883
0
0
0
dTSψSi
0.443510572
0.274149566
0
0
dTSθLT
0
0
0
0
dTEψSi
0.293912516
−0.280924747
0
0
dTEθLT
0
0.457718571
0
0
dψSiθLT
0
−0.005165328
0
0
e
−1.722804167
−2.484892701
−2.976959016
−2.976959016;
TABLE 16
Si(110)
First higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
39.48011293
aTLT(1)
−5.239160454
−5.820942031
−4.867344296
−2.496300587
bTLT(2)
0
0
0
0.00654321
cTLT
0.309375
0.302702703
0.286363636
0.288888889
aTS(2)
24.40391167
40.38499201
0
40.45660337
aTS(1)
−2.128595361
−6.73354721
−3.626479228
−6.290401812
bTS(2)
0.006013184
0.005624543
0
0.005617234
cTS
0.3265625
0.275675676
0.31
0.272222222
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
−51.46488975
0
0
aTE(1)
−1.921891837
−0.509929613
−1.508039016
−0.870147512
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006479182
0
0
cTE
0.153125
0.147297297
0.341818182
0.351388889
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
−0.000165117
0
−9.55404E−05
aψSi(2)
0.000936051
0.00475603
0
0.002198207
aψSi(1)
−0.02141106
0.040196571
−0.017752634
0.036260775
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
2115.829763
0
1531.394676
bψSi(2)
246.9177246
196.5668371
0
199.8263889
cψSi
24.140625
57.97297297
21.13636364
60.41666667
aθLT(2)
0
0
0
−0.003220943
aθLT(1)
0.023743346
0.023741003
0.038368027
0.005042496
bθLT(2)
0
0
0
72.22222222
cθLT
−50.078125
−48.51351351
−50.81818182
−50
dTLTTS
0
0
0
−43.45862557
dTLTTE
−35.16960363
−48.00382984
23.6423037
52.46703277
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0.234382842
0
0
−0.273892853
dψSiθLT
0
−0.00130658
−0.001221935
0
e
−2.175330984
−2.239116787
−2.271294054
−2.496300587;
TABLE 17
Si(110)
Second higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−7.587457615
−7.587457615
−7.587457615
−7.587457615
bTLT(2)
0
0
0
0
cTLT
0.174380165
0.174380165
0.174380165
0.174380165
aTS(2)
0
0
0
0
aTS(1)
−3.979714537
−3.979714537
−3.979714537
−3.979714537
bTS(2)
0
0
0
0
cTS
0.150413223
0.150413223
0.150413223
0.150413223
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−0.865040993
−0.865040993
−0.865040993
−0.865040993
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.245867769
0.245867769
0.245867769
0.245867769
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
5.87537E−07
5.87537E−07
5.87537E−07
5.87537E−07
aψSi(3)
−8.59015E−07
−8.59015E−07
−8.59015E−07
−8.59015E−07
aψSi(2)
−0.001948222
−0.001948222
−0.001948222
−0.001948222
aψSi(1)
−0.027558032
−0.027558032
−0.027558032
−0.027558032
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
1129197.497
1129197.497
1129197.497
1129197.497
bψSi(3)
−1524.372996
−1524.372996
−1524.372996
−1524.372996
bψSi(2)
776.3813947
776.3813947
776.3813947
776.3813947
cψSi
41.52892562
41.52892562
41.52892562
41.52892562
aθLT(2)
0
0
0
0
aθLT(1)
0.018744549
0.018744549
0.018744549
0.018744549
bθLT(2)
0
0
0
0
cθLT
−49.25619835
−49.25619835
−49.25619835
−49.25619835
dTLTTS
140.6234074
140.6234074
140.6234074
140.6234074
dTLTTE
−25.20654793
−25.20654793
−25.20654793
−25.20654793
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−1.789519626
−1.789519626
−1.789519626
−1.789519626;
TABLE 18
Si(110)
Second higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
39.68139696
39.68139696
aTLT(1)
−3.912934705
−3.912934705
−3.801935963
−3.801935963
bTLT(2)
0
0
0.00692398
0.00692398
cTLT
0.306451613
0.306451613
0.297857143
0.297857143
aTS(2)
0
0
0
0
aTS(1)
0
0
0
0
bTS(2)
0
0
0
0
cTS
0
0
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
1.912614784
1.91264784
−6.089810932
−6.089810932
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.148924731
0.148924731
0.347857143
0.347857143
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
8.78847E−06
8.78847E−06
aψSi(2)
−0.0004718
−0.0004718
−0.000160567
−0.000160567
aψSi(1)
0.003265633
0.003265633
−0.023574651
−0.023574651
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
2351.597668
2351.597668
bψSi(2)
847.4765869
847.4765869
880.2091837
880.2091837
cψSi
35.32258065
36.32258065
43.07142857
43.07142857
aθLT(2)
0.005014741
0.005014741
0
0
aθLT(1)
0.023115164
0.023115164
0.030121011
0.030121011
bθLT(2)
67.0626662
67.0626662
0
0
cθLT
−49.62365591
−49.62365591
−51.28571429
−51.28571429
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
0
0
0.125572529
0.125572529
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0.563162206
0.563162206
−0.417002414
−0.417002414
dψSiθLT
0
0
0
0
e
−2.002512986
−2.002512986
−2.550158637
−2.550158637;
TABLE 19
Si(110)
Second higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
2.992014692
2.992014692
−1.461725087
−1.461725087
bTLT(2)
0
0
0
0
cTLT
0.156390977
0.156390977
0.155345912
0.155345912
aTS(2)
0
0
0
0
aTS(1)
−9.089925228
−9.089925228
−1.247751383
−1.247751383
bTS(2)
0
0
0
0
cTS
0.305263158
0.305263158
0.327672956
0.327672956
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
−130.6388144
−130.6388144
aTE(1)
5.773590917
5.773590917
−0.010504162
−0.010504162
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.006662711
0.006662711
cTE
0.166541353
0.166541353
0.341823899
0.341823899
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
1.03604E−05
1.03604E−05
aψSi(2)
−0.000377109
−0.000377109
−0.000138558
−0.000138558
aψSi(1)
−0.013702515
−0.013702515
−0.028102653
−0.028102653
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
3096.349671
3096.349671
bψSi(2)
792.2381141
792.2381141
957.6361695
957.6361695
cψSi
41.39097744
41.39097744
43.20754717
43.20754717
aθLT(2)
0
0
0
0
aθLT(1)
0.015804666
0.015804666
0.028892246
0.028892246
bθLT(2)
0
0
0
0
cθLT
−49.32330827
−49.32330827
−49.62264151
−49.62264151
dTLTTS
0
0
−44.5976835
−44.5976835
dTLTTE
80.90186655
80.90186655
−150.2428298
−150.2428298
dTLTψSi
0
0
0.225109644
0.225109644
dTLTθLT
0
0
0
0
dTSTE
29.68261053
29.68261053
47.35851038
47.35851038
dTSψSi
0.136750854
0.136750854
0
0
dTSθLT
0
0
0
0
dTEψSi
−0.146211814
−0.146211814
0
0
dTEθLT
0.41229257
0.41229257
0
0
dψSiθLT
0
0
0
0
e
−2.596813807
−2.596813807
−2.049341112
−2.049341112;
TABLE 20
Si(110)
Second higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−2.80791074
−2.80791074
0
0
bTLT(2)
0
0
0
0
cTLT
0.3069869
0.3069869
0
0
aTS(2)
0
0
0
0
aTS(1)
−5.618098986
−5.618098986
0
0
bTS(2)
0
0
0
0
cTS
0.286462882
0.286462882
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
−73.23839461
−73.23839461
aTE(1)
8.962154821
8.962154821
−5.710295136
−5.710295136
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.007310763
0.007310763
cTE
0.167467249
0.167467249
0.330930233
0.330930233
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
0.003677309
0.003677309
0
0
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
40.93886463
40.93886463
0
0
aθLT(2)
0.00527863
0.00527863
0
0
aθLT(1)
0.008431458
0.008431458
0
0
bθLT(2)
66.00179249
66.00179249
0
0
cθLT
−50.61135371
−50.61135371
−90
−90
dTLTTS
63.6265441
63.6265441
0
0
dTLTTE
0
0
0
0
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
57.20229582
57.20229582
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
−0.098212695
−0.098212695
0
0
dTEθLT
0.32576925
0.32576925
0
0
dψSiθLT
0
0
0
0
e
−2.431352404
−2.431352404
−2.39032093
−2.39032093;
TABLE 21
Si(110)
Third higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−11.04825287
−11.04825287
−11.04825287
−11.04825287
bTLT(2)
0
0
0
0
cTLT
0.164705882
0.164705882
0.164705882
0.164705882
aTS(2)
0
0
0
0
aTS(1)
0
0
0
0
bTS(2)
0
0
0
0
cTS
0
0
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−12.86806521
−12.86806521
−12.86806521
−12.86806521
aTE(1)
39.88235294
39.88235294
39.88235294
39.88235294
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.019258131
0.019258131
0.019258131
0.019258131
cTE
0.286470588
0.286470588
0.286470588
0.286470588
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
−0.000762445
−0.000762445
−0.000762445
−0.000762445
aψSi(1)
−0.031584918
−0.031584918
−0.031584918
−0.031584918
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
749.7716263
749.7716263
749.7716263
749.7716263
cψSi
52.58823529
52.58823529
52.58823529
52.58823529
aθLT(2)
−0.004115091
−0.004115091
−0.004115091
−0.004115091
aθLT(1)
0.023260981
0.023260981
0.023260981
0.023260981
bθLT(2)
81.16262976
81.16262976
81.16262976
81.16262976
cθLT
−50.11764706
−50.11764706
−50.11764706
−50.11764706
dTLTTS
0
0
0
0
dTLTTE
−32.35244505
−32.35244505
−32.35244505
−32.35244505
dTLTψSi
0.348515389
0.348515389
0.348515389
0.348515389
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
0.000823202
0.000823202
0.000823202
0.000823202
e
−1.678155024
−1.678155024
−1.678155024
−1.678155024;
TABLE 22
Si(110)
Third higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
34.01092867
34.01092867
aTLT(1)
−3.294448859
−3.294448859
−2.996122319
−2.996122319
bTLT(2)
0
0
0.005572031
0.005572031
cTLT
0.328378378
0.328378378
0.31344086
0.31344086
aTS(2)
0
0
0
0
aTS(1)
2.752851676
2.752851676
−1.564359965
−1.564359965
bTS(2)
0
0
0
0
cTS
0.162837838
0.162837838
0.160752688
0.160752688
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−4.548790211
−4.548790211
−1.370514553
−1.370514553
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.165540541
0.165540541
0.355913978
0.355913978
aψSi(6)
0
0
0
0
aψSi(5)
−7.03888E−08
−7.03888E−08
−3.78178E−08
−3.78178E−08
aψSi(4)
1.4265E−06
1.4265E−06
9.79065E−07
9.79065E−07
aψSi(3)
0.000180358
0.000180358
9.73597E−05
9.73597E−05
aψSi(2)
−0.002681874
−0.002681874
−0.00192926
−0.00192926
aψSi(1)
−0.092266284
−0.092266284
−0.04329175
−0.04329175
bψSi(6)
0
0
0
0
bψSi(5)
11701030.08
11701030.08
24265475.25
24265475.25
bψSi(4)
1439156.296
1439156.296
1705613.393
1705613.393
bψSi(3)
1798.436559
1798.436559
6938.899332
6938.899332
bψSi(2)
930.5183985
930.5183985
1060.880593
1060.880593
cψSi
40.23648649
40.23648649
40.08064516
40.08064516
aθLT(2)
0
0
0
0
aθLT(1)
0.046000242
0.046000242
0.001380272
0.001380272
bθLT(2)
0
0
0
0
cθLT
−49.52702703
−49.52702703
−50.05376344
−50.05376344
dTLTTS
−136.9978702
−136.9978702
−73.06084164
−73.06084164
dTLTTE
0
0
0
0
dTLTψSi
0
0
0.096651605
0.096651605
dTLTθLT
0
0
0
0
dTSTE
0
0
−56.78924979
−56.78924979
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0.081014811
0.081014811
0
0
dTEθLT
0
0
−0.194432704
−0.194432704
dψSiθLT
0
0
0.000875955
0.000875955
e
−2.543790382
−2.543790382
−2.964933907
−2.964933907;
TABLE 23
Si(110)
Third higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−13.1565646
−13.1565646
−13.1565646
−13.1565646
bTLT(2)
0
0
0
0
cTLT
0.179661017
0.179661017
0.179661017
0.179661017
aTS(2)
−54.97015257
−54.97015257
−54.97015257
−54.97015257
aTS(1)
1.195559996
1.195559996
1.195559996
1.195559996
bTS(2)
0.006496856
0.006496856
0.006496856
0.006496856
cTS
0.299435028
0.299435028
0.299435028
0.299435028
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−12.83875925
−12.83875925
−12.83875925
−12.83875925
aTE(1)
−2.591177902
−2.591177902
−2.591177902
−2.591177902
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.02062115
0.02062115
0.02062115
0.02062115
cTE
0.282768362
0.282768362
0.282768362
0.282768362
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
−0.00094978
−0.00094978
−0.00094978
−0.00094978
aψSi(1)
−0.016861509
−0.016861509
−0.016861509
−0.016861509
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
−0.00094978
−0.00094978
−0.00094978
−0.00094978
cψSi
44.83050847
44.83050847
44.83050847
44.83050847
aθLT(2)
0
0
0
0
aθLT(1)
0.020120147
0.020120147
0.020120147
0.020120147
bθLT(2)
0
0
0
0
cθLT
−50.50847458
−50.50847458
−50.50847458
−50.50847458
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
0.250474306
0.250474306
0.250474306
0.250474306
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0.031071552
0.031071552
0.031071552
0.031071552
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−1.687640015
−1.687640015
−1.687640015
−1.687640015;
TABLE 24
Si(110)
Third higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−8.387315737
−8.387315737
−11.34973266
−6.017883428
bTLT(2)
0
0
0
0
cTLT
0.313377926
0.313377926
0.291082803
0.294578313
aTS(2)
0
0
0
0
aTS(1)
0.140898252
0.140898252
3.107378473
2.287606243
bTS(2)
0
0
0
0
cTS
0.299331104
0.299331104
0.277707006
0.296385542
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−1.209727849
−1.209727849
−4.259242642
−1.280235687
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.152006689
0.152006689
0.343630573
0.351204819
aψSi(6)
0
0
0
0
aψSi(5)
−2.33027E−08
−2.33027E−08
0
0
aψSi(4)
7.78115E−07
7.78115E−07
0
0
aψSi(3)
5.59108E−05
5.59108E−05
−0.000194818
0
aψSi(2)
−0.002410767
−0.002410767
0.000247924
0
aψSi(1)
−0.027662563
−0.027662563
0.12904143
−0.026766472
bψSi(6)
0
0
0
0
bψSi(5)
2083705.649
2083705.649
0
0
bψSi(4)
1386257.115
1386257.115
0
0
bψSi(3)
−1267.413434
−1267.413434
1811.750092
0
bψSi(2)
895.5856198
895.5856198
293.105197
0
cψSi
42.14046823
42.14046823
19.39490446
67.95180723
aθLT(2)
0
0
0
0
aθLT(1)
0.020067585
0.020067585
−0.011988832
0.032566601
bθLT(2)
0
0
0
0
cθLT
−49.73244147
−49.73244147
−49.61783439
−50.96385542
dTLTTS
0
0
0
0
dTLTTE
0
0
0
41.29194486
dTLTψSi
0
0
−0.203585177
0.376861254
dTLTθLT
0
0
−0.273779971
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
−0.20937463
dTSθLT
−0.349110894
−0.349110894
0
0
dTEψSi
0
0
0
0
dTEθLT
−0.216865482
−0.216865482
0
0
dψSiθLT
0
0
0.00120304
0
e
−2.390757235
−2.390757235
−2.548464154
−2.523994879;
TABLE 25
Si(111)
First higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
16.07631847
20.22733656
30.72650306
27.83979251
bTLT(2)
0
0
0
0
cTLT
0.145833333
0.1625
0.159574468
0.158695652
aTS(2)
0
0
0
0
aTS(1)
17.08812597
27.84866827
31.28009383
12.67453621
bTS(2)
0
0
0
0
cTS
0.154166667
0.172916667
0.161702128
0.163043478
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−96.15629371
0
138.3065683
0
aTE(1)
−1.263589744
2.833915191
−9.345807167
−7.807789594
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.006649306
0
0.006229063
0
cTE
0.170833333
0.14375
0.369148936
0.345652174
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
−0.006862727
aψSi(1)
−0.101535567
−0.012511908
−0.101466433
0.176438509
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
114.9456522
cψSi
24.375
44.375
22.0212766
37.5
aθLT(2)
0
0
0
0
aθLT(1)
0
0
0
0
bθLT(2)
0
0
0
0
cθLT
−90
−90
−90
−90
dTLTTS
−477.9162005
−760.9473336
−1054.386561
−1044.340968
dTLTTE
0
0
0
0
dTLTψSi
0
1.332405924
0
0
dTLTθLT
0
0
0
0
dTSTE
0
−250.1524613
102.33575
105.8611165
dTSψSi
0
0
0
−2.093429604
dTSθLT
0
0
0
0
dTEψSi
−0.613440559
0
1.201832187
−0.525734733
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−0.553295028
−1.074792989
−1.290770348
−1.165057152;
TABLE 26
Si(111)
First higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
−262.3995984
−262.3995984
0
0
aTLT(1)
−59.70400634
−59.70400634
−18.45032018
−20.44479246
bTLT(2)
0.004691358
0.004691358
0
0
cTLT
0.355555556
0.355555556
0.332352941
0.331914894
aTS(2)
0
0
0
0
aTS(1)
−73.33869606
−73.33869606
−9.963926388
−24.5747574
bTS(2)
0
0
0
0
cTS
0.185185185
0.185185185
0.166176471
0.165957447
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−19.84024877
−19.84024877
−8.905455835
−17.17093947
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.157407407
0.157407407
0.369117647
0.373404255
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
−4.69771E−05
−4.69771E−05
0
0
aψSi(3)
−0.000362538
−0.000362538
0
0
aψSi(2)
0.055133453
0.055133453
−0.004320224
0.021125116
aψSi(1)
0.020862911
0.020862911
−0.110606012
−0.064218508
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
138552.1512
138552.1512
0
0
bψSi(3)
−78.36076818
−78.36076818
0
0
bψSi(2)
203.1635802
203.1636802
145.9775087
66.20642825
cψSi
33.05555556
33.05555556
19.41176471
34.46808511
aθLT(2)
0
0
0
0
aθLT(1)
−0.079155699
−0.079155699
0
0.057672719
bθLT(2)
0
0
0
0
cθLT
−49.81481481
−49.81481481
−90
−49.14893617
dTLTTS
0
0
0
0
dTLTTE
−254.5809235
−254.5809235
80.69948416
99.56817027
dTLTψSi
2.260189055
2.260189055
0
0
dTLTθLT
−0.785540829
−0.785540829
0
0
dTSTE
−292.5762951
−292.5762951
0
0
dTSψSi
−5.914103654
−5.914103654
−1.139436429
0
dTSθLT
0
0
0
0
dTEψSi
1.75463008
1.75463008
0.660099875
−3.844659844
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0.006965097
e
−1.304804416
−1.304804416
−2.734683251
−3.115044468;
TABLE 27
Si(111)
First higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0.003649147
0
0
0
aTLT(1)
−17.27824731
−24.3903101
−38.65647339
−21.91795924
bTLT(2)
67.18624026
0
0
0
cTLT
0.154098361
0.15631068
0.17
0.1575
aTS(2)
84.63185118
0
148.7691928
140.0125491
aTS(1)
−6.307527081
−32.68184816
5.38083251
−11.91949736
bTS(2)
0.00446166
0
0.005012245
0.004623438
cTS
0.352459016
0.345631068
0.331428571
0.33875
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
2.909874306
8.840975559
−16.54803788
−0.024546617
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.135245902
0.148058252
0.372857143
0.33125
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0.006216698
0
0
aψSi(1)
−0.068574135
−0.018885558
−0.187578295
0.122573316
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
147.1439344
0
0
cψSi
22.62295082
43.10679612
22.71428571
39.1875
aθLT(2)
0
0
0
0
aθLT(1)
0.023219728
0.047846607
0.097088558
0.096327065
bθLT(2)
0
0
0
0
cθLT
−50.16393443
−50.38834951
−50.42857143
−51.25
dTLTTS
0
−144.763071
0
0
dTLTTE
0
0
−161.2345526
0
dTLTψSi
−0.827435588
0
0
1.107475984
dTLTθLT
0
0
0
0
dTSTE
0
103.0553675
−65.68497311
0
dTSψSi
0
−1.329400713
0.82928215
−0.646921162
dTSθLT
0
0
0
0
dTEψSi
−0.681669875
0.653050787
0.676734069
0.936807034
dTEθLT
0
0
0.481989709
0.52746173
dψSiθLT
0
0
0
0
e
−1.560056382
−2.656750279
−2.259351603
−1.805786084;
TABLE 28
Si(111)
First higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
77.3065693
243.6937004
0
aTLT(1)
−13.49335267
−9.878165228
−6.309863061
−12.90130633
bTLT(2)
0
0.00674795
0.006522811
0
cTLT
0.300961538
0.297350993
0.29858156
0.306818182
aTS(2)
133.2691939
160.4037443
82.71737336
100.5491122
aTS(1)
−9.215218873
−21.20902158
−9.283157312
−7.984268054
bTS(2)
0.006618898
0.005353274
0.006382979
0.005704201
cTS
0.314423077
0.303311258
0.3
0.311363636
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
90.39669198
0
0
aTE(1)
0.170720276
3.925569914
−15.08313602
−9.451928755
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006615499
0
0
cTE
0.15
0.147350993
0.363475177
0.346212121
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
−0.00740803
0
0
0
aψSi(1)
−0.220502432
0.083594751
−0.104344279
0.088096624
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
135.4659763
0
0
0
cψSi
20.76923077
43.70860927
17.87234043
41.47727273
aθLT(2)
0
0
0
0
aθLT(1)
−0.017420386
−0.012240534
0
0
bθLT(2)
0
0
0
0
cθLT
−50.28846154
−50.26490066
−90
−90
dTLTTS
149.298265
220.9283416
135.5319056
135.1493422
dTLTTE
0
0
0
−65.38520659
dTLTψSi
0
0
0
−0.663828772
dTLTθLT
−0.703824061
−0.739197646
0
0
dTSTE
122.4270642
0
−94.62792088
0
dTSψSi
0.714493384
−1.189155195
0
−1.017237669
dTSθLT
0
0
0
0
dTEψSi
0
0.558597609
0
0
dTEθLT
0.734424122
0.628956462
0
0
dψSiθLT
−0.003900657
0.003268439
0
0
e
−2.246432623
−2.691572945
−3.425676672
−3.236112132;
TABLE 29
Si(111)
Second higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−26.67263869
−6.49243933
−20.61574251
−21.06290014
bTLT(2)
0
0
0
0
cTLT
0.15443038
0.175438596
0.160759494
0.156896552
aTS(2)
0
0
0
0
aTS(1)
−7.971316395
7.232224634
−16.40433051
−3.920556446
bTS(2)
0
0
0
0
cTS
0.14556962
0.133333333
0.144303797
0.144827586
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
−110.7824708
−133.1826499
0
aTE(1)
12.77975858
−10.04988717
5.027045348
−5.686378626
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006463527
0.006582278
0
cTE
0.151265823
0.144736842
0.35
0.35862069
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
−0.007219474
0
aψSi(1)
0.028716852
0.04192074
−0.016815807
0.008780601
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
125.0280404
0
cψSi
9.683544304
50
11.58227848
48.10344828
aθLT(2)
0.01035547
0
0
0.014789077
aθLT(1)
0.162093889
0.106646805
0.164306798
0.04587348
bθLT(2)
61.8811088
0
0
55.43995244
cθLT
−49.62025316
−50.35087719
−51.01265823
−51.20689655
dTLTTS
−609.1883956
−724.6623011
−297.9828576
−203.214973
dTLTTE
−215.420422
0
159.6303697
0
dTLTψSi
0
−3.771938969
2.003207828
−2.014745526
dTLTθLT
1.80686724
0
2.218853872
0
dTSTE
0
−307.4269587
0
0
dTSψSi
0
0
−1.097992723
0
dTSθLT
1.985202008
0
2.104127874
0
dTEψSi
0
0
−1.451355926
0
dTEθLT
−203.386471
1.145649707
0
0
dψSiθLT
2.42647485
0.004357557
0
0
e
−5.019952207
−2.13826109
−3.235663805
−3.326865691;
TABLE 30
Si(111)
Second higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
45.51074293
−94.44342524
0
aTLT(1)
0.788515454
−3.454988617
−9.832405019
−3.192556866
bTLT(2)
0
0.006485261
0.006459172
0
cTLT
0.298058252
0.295238095
0.298461538
0.298913043
aTS(2)
0
0
0
0
aTS(1)
−8.97795964
1.31344944
0
0
bTS(2)
0
0
0
0
cTS
0.142718447
0.147619048
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
9.791468713
0.170587985
−0.71523762
−10.72534968
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.15776699
0.124603175
0.356153846
0.347826087
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0.003924448
0.001661439
0
0.00657999
aψSi(1)
0.15776699
−0.024952541
0.02404454
−0.067389114
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
148.4588557
132.0861678
0
152.6937618
cψSi
15.29126214
46.9047619
14.19230769
43.04347826
aθLT(2)
0
0
0
0
aθLT(1)
0.06700163
0.042141715
0.055240362
0.061747926
bθLT(2)
0
0
0
0
cθLT
−48.73786408
−50.15873016
−49.76923077
−49.45652174
dTLTTS
116.7290786
−78.78450728
0
0
dTLTTE
0
85.46351406
−49.85282875
0
dTLTψSi
−0.70199108
0.445481139
0
0.604657146
dTLTθLT
−0.726496636
0
0
0
dTSTE
0
−116.360096
0
0
dTSψSi
0
−0.622709588
0
0
dTSθLT
2.041329502
−0.339115637
0
0
dTEψSi
0
0.20688896
0
0
dTEθLT
0.774150432
0.439880407
−0.6608739
−1.068569294
dψSiθLT
−0.005400114
0.002667922
−0.004937546
0.006290209
e
−4.209434885
−1.791078273
−3.48174155
−3.934527612;
TABLE 31
Si(111)
Second higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−4.673850215
0
−8.8586067
−1.957300157
bTLT(2)
0
0
0
0
cTLT
0.141509434
0
0.153125
0.16
aTS(2)
82.42811022
0
87.42203531
0
aTS(1)
−7.905282467
−4.948155925
−0.569845134
0.521030757
bTS(2)
0.006949092
0
0.006037326
0
cTS
0.294339623
0.314583333
0.297916667
0.285
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
53.51232744
−79.38404758
0
0
aTE(1)
10.58973083
10.26534018
8.135327356
−7.251553825
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.006016376
0.005677083
0
0
cTE
0.183962264
0.1375
0.336458333
0.37
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0.001429494
aψSi(1)
0.010122468
0.039888924
−0.016592245
−0.004853684
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
145.6875
cψSi
11.88679245
48.4375
14.0625
45.75
aθLT(2)
0
0
0
0
aθLT(1)
−0.005093912
0.011098836
0.047530531
0.04750516
bθLT(2)
0
0
0
0
cθLT
−50
−50.41666667
−50.72916667
−49.75
dTLTTS
0
0
91.19418307
251.5375225
dTLTTE
0
0
−156.3654518
0
dTLTψSi
0.322255595
0
0
−0.289820964
dTLTθLT
−0.768436344
0
−0.735737765
0
dTSTE
0
75.51836907
0
0
dTSψSi
−0.512402643
0.300543357
−0.724013025
0.245746891
dTSθLT
0
0
0
0
dTEψSi
0
0
−0.50556971
0
dTEθLT
0
0
0
0
dψSiθLT
0
0.002842264
0
0
e
−2.770026639
−2.638591885
−1.980941925
−2.412296494;
TABLE 32
Si(111)
Second higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
4.449764983
0
−13.78321665
−10.59163435
bTLT(2)
0
0
0
0
cTLT
0.321052632
0
0.309146341
0.303164557
aTS(2)
0
0
0
0
aTS(1)
0
−3.433673203
−1.746861763
3.363230821
bTS(2)
0
0
0
0
cTS
0
0.283443709
0.287804878
0.293037975
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
86.18383552
0
aTE(1)
3.853394073
8.768511808
−1.867550529
−15.68616064
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.007157942
0
cTE
0.181578947
0.135430464
0.356097561
0.363291139
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
0.014178515
0.049910217
−0.008697771
0.012742666
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
12.63157895
45.99337748
15.09146341
45
aθLT(2)
0
0
0
0
aθLT(1)
0
0.061867934
0.051566965
0.028929641
bθLT(2)
0
0
0
0
cθLT
−90
−50.59602649
−50.30487805
−50.56962025
dTLTTS
0
0
0
−103.0440888
dTLTTE
0
0
0
0
dTLTψSi
−0.181721459
0
0
0
dTLTθLT
0
0
0
−0.608943868
dTSTE
0
113.1914268
−75.04640382
−82.04954672
dTSψSi
0
0
−0.554356722
0.673316097
dTSθLT
0
0
0
0
dTEψSi
0
0
−0.512800103
0
dTEθLT
0
0
−0.656702553
0
dψSiθLT
0
0
0
0
e
−2.401219798
−3.18651044
−3.93030224
−4.143483981;
TABLE 33
Si(111)
Third higher-order mode
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−3.047618237
−3.047618237
−3.047618237
−3.047618237
bTLT(2)
0
0
0
0
cTLT
0.160869565
0.160869565
0.160869665
0.160869565
aTS(2)
0
0
0
0
aTS(1)
0
0
0
0
bTS(2)
0
0
0
0
cTS
0
0
0
0
aTE(4)
0
0
0
0
aTE(3)
11.21750437
11.21750437
11.21750437
11.21750437
aTE(2)
−3.666215654
−3.666215654
−3.666215654
−3.666215654
aTE(1)
−0.035248162
−0.035248162
−0.035248162
−0.035248162
bTE(4)
0
0
0
0
bTE(3)
0.000381688
0.000381688
0.000381688
0.000381688
bTE(2)
0.012589792
0.012589792
0.012589792
0.012589792
cTE
0.245652174
0.245652174
0.245652174
0.245652174
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
−0.003582211
−0.003582211
−0.003582211
−0.003582211
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
35.86956522
35.86956522
35.86956522
35.86956522
aθLT(2)
−0.000596775
−0.000596775
−0.000596775
−0.000596775
aθLT(1)
0.003385783
0.003385783
0.003385783
0.003385783
bθLT(2)
77.88279773
77.88279773
77.88279773
77.88279773
cθLT
−47.82608696
−47.82608696
−47.82608696
−47.82608696
dTLTTS
0
0
0
0
dTLTTE
−2.939323227
−2.939323227
−2.939323227
−2.939323227
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
−0.000442922
−0.000442922
−0.000442922
−0.000442922
e
−0.277577227
−0.277577227
−0.277577227
−0.277577227;
TABLE 34
Si(111)
Third higher-order mode
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
0
0
0
0
bTLT(2)
0
0
0
0
cTLT
0
0
0
0
aTS(2)
0
0
0
0
aTS(1)
6.03484153
6.03484153
6.03484153
6.03484153
bTS(2)
0
0
0
0
cTS
0.183333333
0.183333333
0.183333333
0.183333333
aTE(4)
−215.3850281
−215.3850281
−215.3850281
−215.3850281
aTE(3)
54.12265846
54.12265846
54.12265846
54.12265846
aTE(2)
0.942905209
0.942905209
0.942905209
0.942905209
aTE(1)
−1.08045121
−1.08045121
−1.08045121
−1.08045121
bTE(4)
0.000339332
0.000339332
0.000339332
0.000339332
bTE(3)
0.000317558
0.000317558
0.000317558
0.000317558
bTE(2)
0.011265432
0.011265432
0.011265432
0.011265432
cTE
0.211111111
0.211111111
0.211111111
0.211111111
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
−0.004526908
−0.004526908
−0.004526908
−0.004526908
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
27.5
27.5
27.5
27.5
aθLT(2)
−0.00046365
−0.00046365
−0.00046365
−0.00046365
aθLT(1)
0.005349146
0.005349146
0.005349146
0.005349146
bθLT(2)
57.09876543
57.09876543
57.09876543
57.09876543
cθLT
−46.11111111
−46.11111111
−46.11111111
−46.11111111
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
45.80413521
45.80413521
45.80413521
45.80413521
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
−0.071786246
−0.071786246
−0.071786246
−0.071786246
dψSiθLT
−0.000425881
−0.000425881
−0.000425881
−0.000425881
e
−0.446604617
−0.446604617
−0.446604617
−0.446604617;
TABLE 35
Si(111)
Third higher-order mode
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−2.477108842
−2.477108842
−2.477108842
−2.477108842
bTLT(2)
0
0
0
0
cTLT
0.137349398
0.137349398
0.137349398
0.137349398
aTS(2)
0
0
0
0
aTS(1)
−0.488747927
−0.488747927
−0.488747927
−0.488747927
bTS(2)
0
0
0
0
cTS
0.336144578
0.336144578
0.336144578
0.336144578
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−1.973253274
−1.973253274
−1.973253274
−1.973253274
aTE(1)
−0.124870592
−0.124870592
−0.124870592
−0.124870592
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.017915517
0.017915517
0.017915517
0.017915517
cTE
0.256024096
0.256024096
0.256024096
0.256024096
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
7.6083E−07
7.6083E−07
7.6083E−07
7.6083E−07
aψSi(3)
7.21121E−06
7.21121E−06
7.21121E−06
7.21121E−06
aψSi(2)
−0.000857107
−0.000857107
−0.000857107
−0.000857107
aψSi(1)
−0.00490823
−0.00490823
−0.00490823
−0.00490823
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
105622.9088
105622.9088
105622.9088
105622.9088
bψSi(3)
−217.2019476
−217.2019476
−217.2019476
−217.2019476
bψSi(2)
208.4409929
208.4409929
208.4409929
208.4409929
cψSi
30.54216867
30.54216867
30.54216867
30.54216867
aθLT(2)
0
0
0
0
aθLT(1)
0
0
0
0
bθLT(2)
0
0
0
0
cθLT
−90
−90
−90
−90
dTLTTS
4.821777856
4.821777856
4.821777856
4.821777856
dTLTTE
−4.14067246
−4.14067246
−4.14067246
−4.14067246
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0.024454063
0.024454063
0.024454063
0.024454063
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−0.240178915
−0.240178915
−0.240178915
−0.240178915;
TABLE 36
Si(111)
Third higher-order mode
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
0
0
0
0
bTLT(2)
0
0
0
0
cTLT
0
0
0
0
aTS(2)
0
0
0
0
aTS(1)
0.380779889
0.380779889
0.380779889
0.380779889
bTS(2)
0
0
0
0
cTS
0.285294118
0.285294118
0.285294118
0.285294118
aTE(4)
−165.3225345
−165.3225345
−165.3225345
−165.3225345
aTE(3)
23.65923214
23.65923214
23.65923214
23.65923214
aTE(2)
2.256295059
2.256295059
2.256295059
2.256295059
aTE(1)
−0.292409126
−0.292409126
−0.292409126
−0.292409126
bTE(4)
0.00051583
0.00051583
0.00051583
0.00051583
bTE(3)
0.00070344
0.00070344
0.00070344
0.00070344
bTE(2)
0.015017301
0.015017301
0.015017301
0.015017301
cTE
0.220588235
0.220588235
0.220588235
0.220588235
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
−0.004846255
−0.004846255
−0.004846255
−0.004846255
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
29.55882353
29.55882353
29.55882353
29.55882353
aθLT(2)
0
0
0
0
aθLT(1)
0.00165846
0.00165846
0.00165846
0.00165846
bθLT(2)
0
0
0
0
cθLT
−48.52941176
−48.52941176
−48.52941176
−48.52941176
dTLTTS
−0.04933649
−0.04933649
−0.04933649
−0.04933649
dTLTTE
−0.021023839
−0.021023839
−0.021023839
−0.021023839
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
−7.074776252
−7.074776252
−7.074776252
−7.074776252
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
−0.00049898
−0.00049898
−0.00049898
−0.00049898
e
−0.3405485
−0.3405485
−0.3405485
−0.3405485.

7,688 more elements

Acoustic wave device, multiplexer, high-frequency front-end circuit, and communication apparatus

Life of this patent

Acoustic wave device, multiplexer, high-frequency front-end circuit, and communication apparatus

Life of this patent

Abstract

Claims20